Processing apparatus
AssigneeDisco Corporation
InventorYoshinori Kakinuma
Life of this patent
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Abstract
A processing apparatus includes a chuck table having a holding surface for holding a plate-shaped workpiece thereon, a processing unit for processing the plate-shaped workpiece held on the chuck table, a delivery unit for selectively delivering the plate-shaped workpiece onto and from the chuck table, and a control unit for controlling the chuck table, the processing unit, and the delivery unit. The chuck table includes a gas ejection port defined in or around the holding surface and connected to a gas supply system. While the plate-shaped workpiece is not placed on the holding surface, the control unit controls the gas supply system to eject a gas from the gas ejection port to form a protective layer of the gas over the holding surface, thereby preventing foreign matter from being deposited on the holding surface.
Claims8
A processing apparatus comprising:
- a chuck table having a holding surface for holding a plate-shaped workpiece thereon;
- a processing unit for processing the plate-shaped workpiece held on the chuck table;
- a delivery unit for selectively delivering the plate-shaped workpiece onto and from the chuck table;
- and
- a control unit for controlling the chuck table, the processing unit, and the delivery unit,
- wherein the chuck table includes a gas ejection channel fluidly connected to the holding surface and connected to a gas supply system, and while the plate-shaped workpiece is not placed on the holding surface, the control unit controls the gas supply system to eject a gas through the gas ejection channel and into the holding surface to form a protective layer of the gas over the holding surface, thereby preventing foreign matter from being deposited on the holding surface, and
- wherein the control unit is configured and arranged to recognize whether or not the plate-shaped workpiece is placed on the holding surface on the basis of information received from the delivery unit indicating whether the delivery unit has delivered the plate shaped workpiece onto or from the holding surface, and when the control unit recognizes that the plate-shaped workpiece is not placed on the holding surface, the control unit controls the gas supply system to eject the gas through the gas ejection channel and into the holding surface.
A processing apparatus comprising:
- a chuck table having a holding surface for holding a plate-shaped workpiece thereon, wherein the holding surface includes a plurality of gas ejection holes therein;
- a detector associated with the chuck table, wherein the detector is configured and arranged to send an output signal about whether or not the plate-shaped workpiece is placed on the holding surface of the chuck table;
- a processing unit for processing the plate-shaped workpiece held on the chuck table;
- a delivery unit for selectively delivering the plate-shaped workpiece onto and from the chuck table;
- and
- a control unit for controlling the chuck table, the processing unit, and the delivery unit,
- wherein the chuck table includes a gas ejection channel fluidly connected to the gas ejection holes of the holding surface and to a gas supply system, and while the plate-shaped workpiece is not placed on the holding surface, the control unit controls the gas supply system to eject a gas from the gas ejection holes to form a protective layer of the gas over the holding surface, thereby preventing foreign matter from being deposited on the holding surface, and
- wherein the control unit is configured and arranged to recognize whether or not the plate-shaped workpiece is placed on the holding surface on the basis of the output signal received from the detector, and when the control unit recognizes that the plate-shaped workpiece is not placed on the holding surface, the control unit controls the gas supply system to eject the gas through the gas ejection channel and into the holding surface.
Dependencies are inferred from the claim text.