Y10T 279/23
Chucks or sockets: with magnetic or electrostatic means
Official title: with magnetic or electrostatic means
Y10T279/23 (Chucks or sockets: with magnetic or electrostatic means) appears on 564 US grants and 367 published applications in this corpus.
Search patents in Y10T- Granted patents
- 564
- Published applications
- 367
- Assignees
- 217
- Inventors
- 993
- Latest grant
- 29 Sep 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1976 | 2 | 0 |
| 1977 | 1 | 0 |
| 1978 | 0 | 0 |
| 1979 | 0 | 0 |
| 1980 | 1 | 0 |
| 1981 | 0 | 0 |
| 1982 | 0 | 0 |
| 1983 | 2 | 0 |
| 1984 | 4 | 0 |
| 1985 | 3 | 0 |
| 1986 | 2 | 0 |
| 1987 | 7 | 0 |
| 1988 | 1 | 0 |
| 1989 | 2 | 0 |
| 1990 | 1 | 0 |
| 1991 | 4 | 0 |
| 1992 | 8 | 0 |
| 1993 | 6 | 0 |
| 1994 | 7 | 0 |
| 1995 | 10 | 0 |
| 1996 | 9 | 0 |
| 1997 | 13 | 0 |
| 1998 | 37 | 0 |
| 1999 | 45 | 0 |
| 2000 | 32 | 0 |
| 2001 | 30 | 12 |
| 2002 | 25 | 31 |
| 2003 | 21 | 17 |
| 2004 | 12 | 28 |
| 2005 | 16 | 22 |
| 2006 | 14 | 17 |
| 2007 | 13 | 13 |
| 2008 | 18 | 25 |
| 2009 | 15 | 26 |
| 2010 | 18 | 27 |
| 2011 | 19 | 19 |
| 2012 | 30 | 23 |
| 2013 | 22 | 26 |
| 2014 | 23 | 22 |
| 2015 | 20 | 14 |
| 2016 | 17 | 7 |
| 2017 | 10 | 7 |
| 2018 | 11 | 10 |
| 2019 | 11 | 7 |
| 2020 | 9 | 7 |
| 2021 | 5 | 3 |
| 2022 | 5 | 1 |
| 2023 | 0 | 1 |
| 2024 | 1 | 1 |
| 2025 | 0 | 1 |
| 2026 | 2 | 0 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- Electrostatic chuck having extended lifetime29 Sep 2026US 12,751,248 B2APPLIED Materials.Inc.
- Electrostatic chuck17 Feb 2026US 12,557,596 B2Toto Ltd.
- Multipurpose chuck3 Sep 2024US 12,076,794 B2Hammill Manufacturing Company, Co-op Tool Division
- Electrostatic chuck and plasma processing apparatus18 Oct 2022US 11,476,095 B2Tokyo Electron Limited
- Electrostatic chuck19 Jul 2022US 11,393,708 B2Toto Ltd.
- Jig for reflection device and assembly including the same26 Jun 2025US 2025/0205790 A1Hyundai Motor Company
- Electrostatic Chuck Having Extended Lifetime1 Aug 2024US 2024/0258940 A1APPLIED Materials.Inc.
- Multipurpose chuck21 Sep 2023US 2023/0294180 A1Hammill Manufacturing Company, Co-op Tool Division
- Electrostatic chuck6 Oct 2022US 2022/0319898 A1Toto Ltd.
- Electrostatic chuck and manufacturing method therefor12 Aug 2021US 2021/0249260 A1Flowserve Ksm Co., Ltd.
Most cited
By later US patents
- Wafer spacing mask for a substrate support chuck and method of fabricating same799US 5,656,093 AAPPLIED Materials.Inc. · 1997
- Micromachined silicon electrostatic chuck587US 5,583,736 AThe United States of America as represented by the Department of Energy · 1996
- Electrostatic chuck and method of attracting wafer562US 5,777,838 AFujitsu Limited · 1998
- Chucking apparatus and production method for the same482US 6,863,281 B2Sumitomo Osaka Cement Co., Ltd. · 2005
- Substrate clamping technique in IC fabrication processes451US 4,184,188 AVeeco Instruments Inc. · 1980