Electrostatic chuck and manufacturing method therefor
AssigneesKsm Component Co., Ltd., Flowserve Ksm Co., Ltd.
InventorsYun Ho KIM, Joo Hwan KIM, Ki Ryong LEE
Life of this patent
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Abstract
Disclosed are: an electrostatic chuck having a high volume resistivity so as to reduce a leakage current, thereby improving the adsorption and desorption response characteristics of a semiconductor wafer; and a manufacturing method therefor. The electrostatic chuck is a sintered body in which an electrode is impregnated so as to fix a semiconductor wafer by electrostatic force, and comprises alumina, a sintering aid, and a rare earth composite oxide comprising two to five different rare earth metals, has adsorption and desorption response characteristics of a semiconductor wafer of two seconds or less, and has a volume resistivity at room temperature of 1.0E+16 Ω·cm to 1.0E+17 Ω·cm.
Claims10
An electrostatic chuck which is a sintered body in which an electrode is impregnated so as to fix a semiconductor wafer by electrostatic force,
- and which comprises alumina;
- magnesium oxide (MgO) as a sintering aid;
- and a rare earth composite oxide comprising two to five different rare earth metals,
- and the content of the rare earth composite oxide is more than 0 wt. % and 1 wt. % or less based on the total weight of the sintered body,
- and has adsorption and desorption response characteristics of a semiconductor wafer of two seconds or less, and has a volume resistivity at room temperature of 1.0E+16 Ω·cm to 1.0E+17 Ω·cm.
(canceled)
A method of manufacturing an electrostatic chuck comprising the steps of:
- a) preparing a rare earth composite oxide containing 2 to 5 different rare-earth metals by wet-mixing two or more different rare-earth metal oxide powders and a solvent under milling, and then drying, granulating, and heat-treating it;
- b) supplying alumina, a sintering aid, alcohol and a binder to the prepared rare earth composite oxide, and then mixing them;
- c) drying the mixture in step b) to remove the alcohol component;
- d) molding and processing the dried mixture to prepare a pre-molded body;
- e) degreasing the pre-molded body to remove the binder component;
- and
- f) sintering the degreased pre-molded body and then polishing it.
Dependencies are inferred from the claim text.