Y10S 438/961
Ion beam source and generation
Y10S438/961 (Ion beam source and generation) appears on 55 US grants and 29 published applications in this corpus.
Search patents in Y10S- Granted patents
- 55
- Published applications
- 29
- Assignees
- 41
- Inventors
- 119
- Latest grant
- 26 May 2015
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1979 | 1 | 0 |
| 1980 | 2 | 0 |
| 1981 | 3 | 0 |
| 1982 | 0 | 0 |
| 1983 | 1 | 0 |
| 1984 | 3 | 0 |
| 1985 | 0 | 0 |
| 1986 | 0 | 0 |
| 1987 | 0 | 0 |
| 1988 | 1 | 0 |
| 1989 | 1 | 0 |
| 1990 | 2 | 0 |
| 1991 | 1 | 0 |
| 1992 | 1 | 0 |
| 1993 | 0 | 0 |
| 1994 | 0 | 0 |
| 1995 | 1 | 0 |
| 1996 | 1 | 0 |
| 1997 | 1 | 0 |
| 1998 | 1 | 0 |
| 1999 | 1 | 0 |
| 2000 | 1 | 0 |
| 2001 | 2 | 1 |
| 2002 | 1 | 2 |
| 2003 | 3 | 2 |
| 2004 | 3 | 3 |
| 2005 | 4 | 4 |
| 2006 | 1 | 3 |
| 2007 | 2 | 4 |
| 2008 | 3 | 1 |
| 2009 | 3 | 4 |
| 2010 | 4 | 3 |
| 2011 | 3 | 1 |
| 2012 | 2 | 0 |
| 2013 | 0 | 0 |
| 2014 | 1 | 1 |
| 2015 | 1 | 0 |
By publication year. Applications have been published since 2001.
Recent patents
- Apparatus pertaining to solar cells having nanowire titanium oxide cores and graphene exteriors and the co-generation conversion of light into electricity using such solar cells26 May 2015US 9,040,395 B2Dimerond Technologies, LLC
- Reducing wire erosion during damascene processing3 Jun 2014US 8,741,771 B2International Business Machines Corporation
- Ion source29 May 2012US 8,188,445 B2Varian Semiconductor Equipment Associates, Inc.
- Method for manufacturing semiconductor substrate, display panel, and display device7 Feb 2012US 8,110,478 B2Semiconductor Energy Laboratory Co.Ltd.
- Ion source vessel and methods25 Oct 2011US 8,044,348 B2Ionics Mass Spectrometry Group Inc.
- Apparatus Pertaining to Solar Cells Having Nanowire Titanium Oxide Cores and Graphene Exteriors and the Co-Generation Conversion of Light into Electricity Using Such Solar Cells13 Feb 2014US 2014/0041711 A1Dimerond Technologies, LLC
- Ion source4 Aug 2011US 2011/0186749 A1Varian Semiconductor Equipment Associates, Inc.
- Concentric Gate Nanotube Transistor Devices28 Oct 2010US 2010/0270536 A1Etamota Corporation
- Ion source vessel and methods8 Jul 2010US 2010/0171033 A1Ionics Mass Spectrometry Group Inc.
- Concentric gate nanotube transistor devices8 Jul 2010US 2010/0173478 A1Atomate Corporation
Most cited
By later US patents
- Processing method using a focused ion beam77US 4,457,803 ATokyo Shibaura Denki Kabushiki Kaisha · 1984
- Method for forming an insulating film on semiconductor substrate surface and apparatus for carrying out the method70US 6,265,327 B1Japan Science and Technology Corporation · 2001
- Method of determining dose uniformity of a scanning ion implanter70US 6,965,116 B1APPLIED Materials.Inc. · 2005
- Method of forming a silicon nitride layer63US 5,907,792 AMotorola, Inc. · 1999
- Ion source47US 7,767,977 B1Varian Semiconductor Equipment Associates, Inc. · 2010