Y10S 156/917
Differential etching apparatus having a barrel reactor
Y10S156/917 (Differential etching apparatus having a barrel reactor) appears on 22 US grants and 2 published applications in this corpus.
Search patents in Y10S- Granted patents
- 22
- Published applications
- 2
- Assignees
- 14
- Inventors
- 31
- Latest grant
- 9 Dec 2008
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1981 | 1 | 0 |
| 1982 | 0 | 0 |
| 1983 | 2 | 0 |
| 1984 | 3 | 0 |
| 1985 | 1 | 0 |
| 1986 | 0 | 0 |
| 1987 | 1 | 0 |
| 1988 | 1 | 0 |
| 1989 | 0 | 0 |
| 1990 | 1 | 0 |
| 1991 | 1 | 0 |
| 1992 | 1 | 0 |
| 1993 | 0 | 0 |
| 1994 | 1 | 0 |
| 1995 | 2 | 0 |
| 1996 | 1 | 0 |
| 1997 | 1 | 0 |
| 1998 | 1 | 0 |
| 1999 | 0 | 0 |
| 2000 | 1 | 0 |
| 2001 | 1 | 1 |
| 2002 | 0 | 0 |
| 2003 | 1 | 0 |
| 2004 | 0 | 0 |
| 2005 | 0 | 0 |
| 2006 | 0 | 1 |
| 2007 | 0 | 0 |
| 2008 | 1 | 0 |
By publication year. Applications have been published since 2001.
Recent patents
- Modified susceptor for barrel reactor9 Dec 2008US 7,462,246 B2MEMC Electronic Materials, Inc.
- Method for improving uniformity in batch processing of semiconductor wafers19 Aug 2003US 6,607,987 B2Micron Technology, Inc.
- Apparatus and method for improving uniformity in batch processing of semiconductor wafers13 Nov 2001US 6,315,859 B1Micron Technology, Inc.
- Apparatus and method for improving uniformity in batch processing of semiconductor wafers29 Feb 2000US 6,030,902 A
- Contaminant reduction improvements for plasma etch chambers10 Feb 1998US 5,716,484 AAPPLIED Materials.Inc.
Most cited
By later US patents
- Wafer holding apparatus and method106US 4,473,455 AAT&T Bell Laboratories · 1984
- Film forming method and film forming device105US 5,015,330 AKabushiki Kaisha Toshiba · 1991
- High capacity etching apparatus and method65US 4,298,443 ABell Telephone Laboratories, Incorporated · 1981
- Apparatus and method for plasma-assisted etching of wafers61US 4,427,516 ABell Telephone Laboratories, Incorporated · 1984
- Plasma processing apparatus employing a textured focus ring61US 5,474,649 AAPPLIED Materials.Inc. · 1995