Contaminant reduction improvements for plasma etch chambers
AssigneeApplied Materials, Inc.
InventorsGreg Blackburn, Joseph Kava, Richard McGovern, Yan Rozenzon
Life of this patent
Estimating the term…
Abstract
A plasma etch chamber includes a modified focus ring which is used in conjunction with chamber pressure throttling to eject contaminants in the focus ring away from the substrate just before the etching cycle is completed. Additionally, process gas is directed against the inner wall of the chamber to create a swirling flow of plasma within the chamber and thus disturb any contaminant-generating field adjacent the chamber wall. A process gas, or a non-reactive purge gas, may also be supplied from a diffuser atop the cathode, to direct a gas layer along the top and sides of the chamber to reduce contaminant build-up on the chamber surfaces.
Claims19
An apparatus for processing substrates in a plasma and transporting contaminants away from the substrates in a plasma and transporting contaminants away from the substrates, comprising:
- a sealable chamber capable of being evacuated for substrate processing;
- a gas supply and exhaust in communication with said sealable chamber;
- an electric field generator for establishing an electric field in said chamber capable of supporting gas in said chamber as a plasma;
- and
- a pressure controller for increasing and decreasing the pressure in said chamber during etch processing, said pressure controller being programmed to reduce said chamber pressure at a first specific moment prior to deenergization of said electric field generator and towards the completion of a substrate operation and programmed to increase said chamber pressure at a second specific moment prior to said first specific moment.
A plasma etch chamber, comprising:
- a sealable housing having an outer wall and a cover which form an anode, said outer wall and said cover each having an inner surface;
- a cathode received in said sealable housing and including at least one pedestal located on a face thereof for receiving substrates for etching in the chamber;
- and
- a diffuser disposed on said cathode to direct a gas against the inner surface of said cover and to thereby prevent the formation of polymer on the inner surfaces of said outer wall and cover and to flush contaminants away from said inner surfaces of said outer wall and cover during the etching of the substrates.
A plasma etch chamber, comprising:
- a sealable housing having an outer wall and a cover which form an anode, said outer wall and said cover each having an inner surface;
- a multi-sided upwardly extending cathode received in said sealable housing and including at least one pedestal located on a side thereof for receiving substrates for etching in the chamber;
- an upwardly extending tube located between the outer wall of said housing and said cathode for delivering a process gas required for etching the substrates;
- and
- a diffuser disposed on top of said cathode to direct a gas received through said cathode against the inner surface of said cover and to thereby prevent the formation of polymer on the inner surface of said outer wall and cover and to flush contaminants away from said inner surface of said outer wall and cover during the etching of the substrates.
A plasma etch chamber comprising:
- a chamber wall having an inner surface;
- a structure having one or more faces including a particular face on which a substrate to be etched is placed;
- and
- a gas tube configured to deliver a process gas into the chamber, the gas tube having first and second sets of apertures wherein:
- the first set of apertures is configured to direct a first portion of the process gas toward the structure, the first set of apertures including one or more apertures for directing the process gas across the particular face of the structure;
- the second set of apertures is configured to direct substantially the entire remaining portion of gas flowing in the tube against the inner surface of the chamber wall;
- and
- apertures in the second set are disposed approximately 180 degrees from the one or more apertures for directing the process gas across the particular face of the structure.
A plasma etch chamber comprising:
- a chamber wall having an inner surface;
- and
- a plurality of gas tubes configured to deliver a process gas into the chamber, each of the gas tubes having a respective aperture, each of the apertures being at the same vertical height and positioned so as to direct the process gas in the same rotational direction obliquely against the inner surface of the chamber wall, thereby creating a rotational current of plasma about the inner surface of the chamber wall at the vertical height during an etching operation of said substrates.
A plasma etch chamber comprising:
- a chamber wall having an inner surface;
- a structure having a face on which a substrate to be etched is placed;
- and
- a gas tube configured to deliver a process gas into the chamber, the gas tube being located between the structure and the inner surface of the wall, the gas tube having a first set of apertures and a second set of apertures wherein:
- the first set of apertures is configured to direct a first portion of the process gas toward the structure, the first set of apertures including one or more apertures for directing the process gas across the face of the structure;
- and
- the second set of apertures is configured to direct substantially the entire remaining portion of gas flowing in the tube at an acute angle to a plane that extends from the gas tube to the inner surface of the chamber wall and intersects the inner surface of the chamber wall at a right angle .
Dependencies are inferred from the claim text.