Y10S 148/025
Deposition multi-step
Y10S148/025 (Deposition multi-step) appears on 91 US grants and 0 published applications in this corpus.
Search patents in Y10S- Granted patents
- 91
- Published applications
- 0
- Assignees
- 49
- Inventors
- 201
- Latest grant
- 26 Jan 1999
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1976 | 5 | 0 |
| 1977 | 5 | 0 |
| 1978 | 4 | 0 |
| 1979 | 3 | 0 |
| 1980 | 4 | 0 |
| 1981 | 1 | 0 |
| 1982 | 0 | 0 |
| 1983 | 0 | 0 |
| 1984 | 0 | 0 |
| 1985 | 5 | 0 |
| 1986 | 7 | 0 |
| 1987 | 2 | 0 |
| 1988 | 1 | 0 |
| 1989 | 12 | 0 |
| 1990 | 12 | 0 |
| 1991 | 11 | 0 |
| 1992 | 6 | 0 |
| 1993 | 6 | 0 |
| 1994 | 3 | 0 |
| 1995 | 1 | 0 |
| 1996 | 1 | 0 |
| 1997 | 1 | 0 |
| 1998 | 0 | 0 |
| 1999 | 1 | 0 |
By publication year. Applications have been published since 2001.
Recent patents
- Method for growing single crystal III-V compound semiconductor layers on non single crystal III-V Compound semiconductor buffer layers26 Jan 1999US 5,863,811 ASony Corporation
- Method for fabricating semiconductor device25 Nov 1997US 5,691,237 AFujitsu Limited
- Method of fabricating semiconductor devices28 May 1996US 5,521,126 ANEC Corporation
- Semiconductor device and method for fabricating the same5 Sep 1995US 5,448,111 AFujitsu Limited
- Method of making a monolithic integrated circuit having compound semiconductor layer epitaxially grown on ceramic substrate18 Oct 1994US 5,356,831 AEaton Corporation
No published applications in this class yet.
Most cited
By later US patents
- Method for producing compound thin films1,267US 4,058,430 A1977
- Selective deposition of amorphous and polycrystalline silicon345US 4,963,506 AMotorola, Inc. · 1990
- Process for CVD deposition of tungsten layer on semiconductor wafer345US 5,028,565 AAPPLIED Materials.Inc. · 1991
- Polysilicon thin film process151US 4,897,360 AWisconsin Alumni Research Foundation · 1990
- Monolithic integrated circuit having compound semiconductor layer epitaxially grown on ceramic substrate135US 5,159,413 AEaton Corporation · 1992