Y10S 134/00
Cleaning and liquid contact with solids
Y10S134/00 (Cleaning and liquid contact with solids) appears on 2,704 US grants and 1,244 published applications in this corpus.
Search patents in Y10S- Granted patents
- 2,704
- Published applications
- 1,244
- Assignees
- 626
- Inventors
- 3,553
- Latest grant
- 14 Jan 2025
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1976 | 18 | 0 |
| 1977 | 11 | 0 |
| 1978 | 11 | 0 |
| 1979 | 5 | 0 |
| 1980 | 11 | 0 |
| 1981 | 13 | 0 |
| 1982 | 13 | 0 |
| 1983 | 14 | 0 |
| 1984 | 19 | 0 |
| 1985 | 22 | 0 |
| 1986 | 12 | 0 |
| 1987 | 29 | 0 |
| 1988 | 41 | 0 |
| 1989 | 42 | 0 |
| 1990 | 35 | 0 |
| 1991 | 32 | 0 |
| 1992 | 40 | 0 |
| 1993 | 50 | 0 |
| 1994 | 60 | 0 |
| 1995 | 50 | 0 |
| 1996 | 67 | 0 |
| 1997 | 72 | 0 |
| 1998 | 103 | 0 |
| 1999 | 153 | 0 |
| 2000 | 172 | 0 |
| 2001 | 188 | 117 |
| 2002 | 230 | 208 |
| 2003 | 223 | 166 |
| 2004 | 179 | 180 |
| 2005 | 133 | 117 |
| 2006 | 102 | 95 |
| 2007 | 91 | 72 |
| 2008 | 105 | 78 |
| 2009 | 57 | 54 |
| 2010 | 73 | 40 |
| 2011 | 74 | 30 |
| 2012 | 57 | 34 |
| 2013 | 20 | 16 |
| 2014 | 32 | 15 |
| 2015 | 24 | 11 |
| 2016 | 5 | 1 |
| 2017 | 5 | 5 |
| 2018 | 6 | 1 |
| 2019 | 1 | 2 |
| 2020 | 0 | 1 |
| 2021 | 1 | 0 |
| 2022 | 2 | 0 |
| 2023 | 0 | 1 |
| 2024 | 0 | 0 |
| 2025 | 1 | 0 |
By publication year. Applications have been published since 2001.
Subgroups
Granted patents
Recent patents
- Apparatus and method for processing substrate14 Jan 2025US 12,198,950 B2Semes Co., Ltd.
- Contact lens packaging solutions containing hydrophilic polymers endcapped with a hydrophilic and a hydrophobic group8 Nov 2022US 11,492,189 B2Bausch & Lomb Incorporated
- Apparatus and method for contamination identification26 Apr 2022US 11,311,917 B2Bruker Nano, Inc.
- Substrate processing method and substrate processing system20 Jul 2021US 11,069,548 B2Tokyo Electron Limited
- Substrate processing method and substrate processing system3 Sep 2019US 10,403,525 B2Tokyo Electron Limited
- Apparatus and method for processing substrate5 Jan 2023US 2023/0005768 A1Semes Co., Ltd.
- Packaging solutions30 Jul 2020US 2020/0239217 A1Bausch & Lomb Incorporated
- Apparatus and method for processing substrate28 Nov 2019US 2019/0362993 A1Semes Co., Ltd.
- Substrate processing method and substrate processing system28 Nov 2019US 2019/0362996 A1Tokyo Electron Limited
- Substrate processing method and substrate processing system1 Mar 2018US 2018/0061692 A1Tokyo Electron Limited
Most cited
By later US patents
- Accelerated plasma clean584US 6,374,831 B1APPLIED Materials.Inc. · 2002
- Parallel plate development with multiple holes in top plate for control of developer flow and pressure560US 6,688,784 B1Advanced Micro Devices, Inc. · 2004
- Semiconductor device manufacturing system534US 6,212,789 B1Canon Sales Co., Inc. · 2001
- Method of cleaning UV irradiation chamber527US 7,789,965 B2ASM Japan K .K. · 2010
- Method of cleaning CVD equipment processing chamber526US 7,234,476 B2ASM Japan K .K. · 2007