Substrate processing method and substrate processing system
AssigneeTokyo Electron Limited
InventorsToru Nishino, Kiyohito Iijima, Shigeru Ishizawa
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Abstract
A substrate processing method is provided. The substrate processing method includes placing a substrate storage container storing a substrate on a load port; automatically determining a type of the substrate stored in the placed substrate storage container; and, by referring to a storage unit that stores parameter data set related to a transport condition for each type of substrate, controlling transport of the substrate stored in the substrate storage container based on the parameter data set corresponding to the automatically determined substrate type to process the substrate.
Claims9
A substrate processing method comprising:
- placing a substrate storage container storing a substrate on a load port;
- detecting identification information of the substrate storage container;
- automatically determining a type of the substrate stored in the placed substrate storage container based on the detected identification information of the substrate storage container;
- and,
- by referring to a storage unit that stores a parameter data set related to a transport condition for each substrate type, controlling transport of the substrate stored in the substrate storage container based on the parameter data set corresponding to the automatically determined type of the substrate to process the substrate.
A substrate processing system comprising:
- a load port on which a substrate storage container storing a substrate is placed;
- and
- a control unit configured to detect identification information of the substrate storage container, automatically determine a type of the substrate stored in the substrate storage container placed on the load port based on the detected identification information of the substrate storage container, and, by referring to a storage unit that stores a parameter data set related to a transport condition for each type of the substrates, to control transport of the substrate stored in the substrate storage container based on the parameter data set corresponding to the automatically determined substrate type.
Dependencies are inferred from the claim text.