H03H 9/171
Implemented with thin-film techniques, i.e. of the film bulk acoustic resonator [fbar]
Official title: {implemented with thin-film techniques, i.e. of the film bulk acoustic resonator [FBAR] type}
H03H9/171 (Implemented with thin-film techniques, i.e. of the film bulk acoustic resonator [fbar]) appears on 1,931 US grants and 2,548 published applications in this corpus.
Search patents in H03H- Granted patents
- 1,931
- Published applications
- 2,548
- Assignees
- 344
- Inventors
- 2,039
- Latest grant
- 29 Sep 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1980 | 1 | 0 |
| 1981 | 0 | 0 |
| 1982 | 0 | 0 |
| 1983 | 0 | 0 |
| 1984 | 0 | 0 |
| 1985 | 2 | 0 |
| 1986 | 3 | 0 |
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| 2001 | 9 | 4 |
| 2002 | 13 | 16 |
| 2003 | 13 | 24 |
| 2004 | 19 | 49 |
| 2005 | 33 | 81 |
| 2006 | 32 | 51 |
| 2007 | 49 | 62 |
| 2008 | 50 | 48 |
| 2009 | 55 | 37 |
| 2010 | 42 | 46 |
| 2011 | 37 | 33 |
| 2012 | 27 | 48 |
| 2013 | 27 | 58 |
| 2014 | 44 | 68 |
| 2015 | 58 | 61 |
| 2016 | 58 | 52 |
| 2017 | 65 | 115 |
| 2018 | 48 | 108 |
| 2019 | 95 | 131 |
| 2020 | 140 | 170 |
| 2021 | 131 | 205 |
| 2022 | 142 | 299 |
| 2023 | 146 | 273 |
| 2024 | 225 | 204 |
| 2025 | 205 | 190 |
| 2026 | 124 | 115 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Subgroups
Granted patents
Recent patents
- Metal-piezoelectric-metal capacitor29 Sep 2026US 12,750,032 B2Murata Manufacturing Co., Ltd.
- Film bulk acoustic resonator29 Sep 2026US 12,750,033 B2AAC Technologies (Nanjing) Co., Ltd.
- Method for manufacturing a transversely-excited film bulk acoustic resonator (XBAR)22 Sep 2026US 12,744,512 B2Murata Manufacturing Co., Ltd.
- Acoustic wave device having stacked piezoelectric layers between electrodes22 Sep 2026US 12,744,513 B2Skyworks Global Pte. Ltd.
- Support substrate for passive electronic component, passive electronic component, semiconductor device, matching circuit, and filter circuit22 Sep 2026US 12,745,457 B2Murata Manufacturing Co., Ltd.
- Method for producing a donor substrate for transferring a piezoelectric layer onto a carrier substrate8 Oct 2026US 2026/0312560 A1
- Acoustic wave device and filter device1 Oct 2026US 2026/0303055 A1Murata Manufacturing Co., Ltd.
- Acoustic wave resonator1 Oct 2026US 2026/0303058 A1Teknologian tutkimuskeskus VTT Oy
- Elastic wave resonator and communication device24 Sep 2026US 2026/0291463 A1KYOCERA Corporation
- Acoustic wave device17 Sep 2026US 2026/0280511 A1Murata Manufacturing Co., Ltd.
Most cited
By later US patents
- Top-via etch technique for forming dielectric membranes337US 5,853,601 ANorthrop Grumman Corporation · 1998
- Piezoelectric resonator with an efficient all-dielectric Bragg reflector301US 7,463,118 B2Texas Instruments Incorporated · 2008
- Tunable thin film acoustic resonators and method for making the same294US 5,587,620 AHewlett-Packard Company · 1996
- Bragg mirror optimized for shear waves290US 7,684,109 B2Maxim Integrated Products, Inc. · 2010
- Laterally coupled bulk acoustic wave filter with improved passband characteristics282US 9,219,466 B2Teknologian tutkimuskeskus VTT Oy · 2015