Laterally coupled bulk acoustic wave filter with improved passband characteristics
AssigneeTeknologian tutkimuskeskus VTT Oy
InventorsJohanna Meltaus, Tuomas Pensala
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AssigneeTeknologian tutkimuskeskus VTT Oy
InventorsJohanna Meltaus, Tuomas Pensala
Estimating the term…
The invention relates to a laterally coupled bulk acoustic wave (LBAW) filter comprising a vibration layer for carrying bulk acoustic waves, electrode means comprising a first electrode coupled to the vibration layer for exciting to the vibration layer at least one longitudinal wave mode having a first frequency band and one shear wave mode having a second frequency band, and a second electrode coupled to the vibration layer for sensing the filter pass signal, the first and second electrodes being laterally arranged with respect to each other, and an acoustic reflector structure in acoustic connection with the vibration layer. According to the invention, the reflector structure is adapted to acoustically isolate the vibration layer from its surroundings at the first frequency band more efficiently than at the second frequency band for suppressing the effect of the shear wave mode at the second frequency band from the filter pass signal. The invention helps to improve the quality of LBAW filter passbands.
Laterally coupled bulk acoustic wave filter comprising,
A method of filtering an electrical RF signal, comprising
Dependencies are inferred from the claim text.