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US 2026/0303058 A1Published application
Acoustic wave resonator
AssigneeTeknologian tutkimuskeskus VTT Oy
InventorTuomas PENSALA
Life of this patent
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Abstract
An acoustic wave resonator comprising a piezoelectric layer and a drive electrode and a counter-electrode connected to the piezoelectric layer. The counter-electrode is adjacent to the drive electrode and the counter-electrode, and the drive electrode together delimit a resonance region in the piezoelectric layer. The piezoelectric layer is made of a single-crystal piezoelectric material.
Claims9
An acoustic wave resonator comprising
- a piezoelectric layer with a horizontal first surface and a horizontal second surface, wherein the second surface is opposite to the first surface in a vertical direction,
- a drive electrode connected to the first surface of the piezoelectric layer,
- a counter-electrode connected to the first or second surface of the piezoelectric layer,
- wherein the counter-electrode is adjacent to the drive electrode and the counter-electrode and the drive electrode together delimit a resonance region in the piezoelectric layer,
- and the drive electrode and counter-electrode are connected to a control circuit, characterized in that the thickness of the piezoelectric layer is in the range 0.1-20 μm, and the piezoelectric layer is made of a single-crystal piezoelectric material, and the piezoelectric material has a crystal structure which allows an alternating voltage signal between the drive electrode and the counter-electrode to create horizontal particle oscillation in the piezoelectric layer.
2 more elements
Dependencies are inferred from the claim text.