H03H 2009/155
Using mems techniques
Official title: {using MEMS techniques}
H03H2009/155 (Using mems techniques) appears on 153 US grants and 147 published applications in this corpus.
Search patents in H03H- Granted patents
- 153
- Published applications
- 147
- Assignees
- 69
- Inventors
- 234
- Latest grant
- 22 Sep 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 2009 | 0 | 1 |
| 2010 | 0 | 0 |
| 2011 | 0 | 0 |
| 2012 | 1 | 2 |
| 2013 | 4 | 5 |
| 2014 | 5 | 6 |
| 2015 | 7 | 8 |
| 2016 | 10 | 11 |
| 2017 | 8 | 25 |
| 2018 | 18 | 19 |
| 2019 | 17 | 13 |
| 2020 | 19 | 13 |
| 2021 | 15 | 7 |
| 2022 | 16 | 8 |
| 2023 | 13 | 5 |
| 2024 | 10 | 5 |
| 2025 | 4 | 12 |
| 2026 | 6 | 7 |
By publication year. 2026 runs to 8 Oct.
Recent patents
- MEMS resonator22 Sep 2026US 12,744,514 B2KYOCERA Technologies Oy
- Temperature stable MEMS resonator8 Sep 2026US 12,732,155 B1SiTime Corporation
- Microelectromechanical resonator18 Aug 2026US 12,712,521 B2SiTime Corporation
- Package structure and method for manufacturing the same17 Feb 2026US 12,552,662 B2Murata Manufacturing Co., Ltd.
- Laterally-doped MEMS resonator with piezoelectric layer17 Feb 2026US 12,556,157 B1SiTime Corporation
- Mems resonator comprising in-phase and out-of-phase elements8 Oct 2026US 2026/0312564 A1KYOCERA Technologies Oy
- Chip with different types of resonators and related timing products27 Aug 2026US 2026/0254455 A1Skyworks Solutions, Inc.
- Slanted resonator13 Aug 2026US 2026/0238179 A1KYOCERA Technologies Oy
- Tuning The Frequency-Temperature Response of MEMS Resonators Using Composite Eigenmodes23 Jul 2026US 2026/0213722 A1Stathera IP Holdings Inc.
- Wafer-level-packaged silicon-piezoelectric resonator21 May 2026US 2026/0142643 A1University of Florida Research Foundation, Inc.
Most cited
By later US patents
- Nano- and micro-electromechanical resonators275US 9,425,765 B2Northeastern University · 2016
- Method for manufacturing a vibrating MEMS circuit263US 9,369,105 B1RF Micro Devices, Inc. · 2016
- Guided wave devices with embedded electrodes and non-embedded electrodes171US 10,211,806 B2Qorvo US, Inc. · 2019
- Method for fabricating a microelectromechanical system (MEMS) resonator26US 8,234,774 B2SiTime Corporation · 2012
- Nano- and micro-electromechanical resonators24US 9,705,469 B2Northeastern University · 2017