Package structure and method for manufacturing the same
AssigneeMurata Manufacturing Co., Ltd.
InventorsYoshiyuki Higuchi, Masakazu Fukumitsu
Life of this patent
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Abstract
A package structure that includes a pair of substrates arranged to oppose each other so as to form an internal space; a bonding portion sealing the pair of substrates; an element is sealed in the internal space and surrounded by the pair of substrates; an adsorption layer within the internal space and opposing at least one substrate of the pair of substrates, the adsorption layer constructed to adsorbs at least hydrogen; and a diffusion-inhibiting layer between the at least one substrate and the adsorption layer, and in which hydrogen is more difficult to diffuse compared with in the at least one substrate.
Claims20
A package structure comprising:
- a pair of substrates arranged to oppose each other so as to form an internal space;
- a bonding portion sealing the pair of substrates;
- an element sealed in the internal space and surrounded by the pair of substrates;
- an adsorption layer within the internal space and opposing at least one substrate of the pair of substrates, the adsorption layer constructed to adsorbs at least hydrogen;
- and
- a diffusion-inhibiting layer between the at least one substrate and the adsorption layer, and in which hydrogen is more difficult to diffuse compared with in the at least one substrate.
A method for manufacturing a package structure, the method comprising:
- forming an adsorption layer which adsorbs at least hydrogen on at least one substrate of a pair of substrates;
- forming, on the at least one substrate, a diffusion-inhibiting layer in which hydrogen is more difficult to diffuse compared with in the at least one substrate;
- arranging the pair of substrates such that the adsorption layer on the at least one substrate opposes the other substrate;
- and
- sealing an element in an internal space surrounded by the pair of substrates by forming a bonding portion between the pair of substrates.
Dependencies are inferred from the claim text.