H03H 2009/02291
Beams
Official title: {Beams}
H03H2009/02291 (Beams) appears on 147 US grants and 151 published applications in this corpus.
Search patents in H03H- Granted patents
- 147
- Published applications
- 151
- Assignees
- 77
- Inventors
- 291
- Latest grant
- 8 Sep 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 2004 | 1 | 0 |
| 2005 | 1 | 1 |
| 2006 | 0 | 1 |
| 2007 | 1 | 1 |
| 2008 | 0 | 0 |
| 2009 | 0 | 4 |
| 2010 | 0 | 5 |
| 2011 | 5 | 9 |
| 2012 | 7 | 7 |
| 2013 | 6 | 6 |
| 2014 | 12 | 14 |
| 2015 | 4 | 9 |
| 2016 | 17 | 13 |
| 2017 | 13 | 8 |
| 2018 | 10 | 9 |
| 2019 | 8 | 4 |
| 2020 | 7 | 10 |
| 2021 | 7 | 7 |
| 2022 | 7 | 11 |
| 2023 | 13 | 10 |
| 2024 | 11 | 7 |
| 2025 | 12 | 8 |
| 2026 | 5 | 7 |
By publication year. 2026 runs to 8 Oct.
Subgroups
Granted patents
- H03H 2009/02299Comb-like, i.e. the beam comprising a plurality of fingers or protrusions alongIndexing code44
- H03H 2009/02314Forming part of a transistor structureIndexing code30
- H03H 2009/02322MaterialIndexing code30
- H03H 2009/02307Dog-bone-like structure, i.e. the elongated part of the "bone" is doubly clampedIndexing code28
Recent patents
- Temperature stable MEMS resonator8 Sep 2026US 12,732,155 B1SiTime Corporation
- Microelectromechanical resonator18 Aug 2026US 12,712,521 B2SiTime Corporation
- Vibrator device14 Jul 2026US 12,683,573 B2Seiko Epson Corporation
- MEMS resonator10 Mar 2026US 12,574,002 B2KYOCERA Technologies Oy
- Tunable resonator6 Jan 2026US 12,520,575 B2Taiwan Semiconductor Manufacturing Company.Ltd
- Mems resonator comprising in-phase and out-of-phase elements8 Oct 2026US 2026/0312564 A1KYOCERA Technologies Oy
- Slanted resonator13 Aug 2026US 2026/0238179 A1KYOCERA Technologies Oy
- Tuning The Frequency-Temperature Response of MEMS Resonators Using Composite Eigenmodes23 Jul 2026US 2026/0213722 A1Stathera IP Holdings Inc.
- Tunable resonator7 May 2026US 2026/0129963 A1Taiwan Semiconductor Manufacturing Company.Ltd
- Mems resonator5 Mar 2026US 2026/0066870 A1Rohm Co., Ltd.
Most cited
By later US patents
- Method for manufacturing a vibrating MEMS circuit263US 9,369,105 B1RF Micro Devices, Inc. · 2016
- Time base comprising an integrated micromechanical tuning fork resonator52US 6,831,531 B1ETA SA Manufacture Horlogere Suisse · 2004
- Quartz-based MEMS resonators and methods of fabricating same30US 8,765,615 B1HRL Laboratories, LLC · 2014
- Method for fabricating a microelectromechanical system (MEMS) resonator26US 8,234,774 B2SiTime Corporation · 2012
- Temperature-engineered MEMS resonator23US 9,705,470 B1SiTime Corporation · 2017