Tunable resonator
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorJun-De Jin
Life of this patent
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Abstract
A resonator device includes a substrate with a first number of fins extending over the substrate. The fins extend along the substrate in a first direction. A second number of conductive fingers are provided over the fins, which extend in a second direction perpendicular to the first direction. The first number is less than or equal to the second number. The conductive fingers are configured to receive an input signal such that the conductive fingers resonate at an output frequency. The conductive fingers define a finger pitch therebetween, and the output frequency is based on the finger pitch.
Claims20
A device, comprising:
- a substrate;
- a first number of fins over the substrate, the fins extending along the substrate in a first direction, wherein the fins do not have source/drain epitaxial thereon;
- a second number of conductive fingers over the fins, the conductive fingers extending in a second direction perpendicular to the first direction, the first number being less than or equal to the second number, the conductive fingers configured to receive an input signal such that the conductive fingers resonate at an output frequency;
- and
- wherein the conductive fingers are spaced apart from one another based on a predetermined finger pitch.
A device, comprising:
- a drive region including:
- a plurality of fins extending parallel to one another in a first direction, wherein the fins are spaced apart from one another in a second direction perpendicular to the first direction;
- a plurality of dielectric structures situated in gaps formed between adjacent ones of the fins;
- a plurality of conductive drive fingers over the fins, the conductive drive fingers extending in the second direction and connected to receive a periodic input signal;
- a dummy finger that is not connected to receive the periodic input signal;
- and
- a sense region including:
- a sense transistor having a source, a drain and a gate, the gate connected to the dummy finger.
A method, comprising:
- forming a plurality of semiconductor fins extending in first direction over a substrate;
- forming a plurality of conductive drive fingers extending in a second direction over the fins;
- forming a dummy finger extending in the second direction over the fins;
- connecting a voltage input terminal configured to receive a drive signal to the plurality of conductive drive fingers;
- and
- connecting the dummy finger to an output terminal configured to output a sense current.
Dependencies are inferred from the claim text.