Mems resonator

Abstract

A MEMS resonator includes a pantograph that is a parallelogram, an oscillator connected to each vertex of the pantograph, and an electrode disposed opposite each oscillator, and forming a capacitor with the oscillator. A set of the electrodes disposed opposite to a set of the oscillators along an extension direction of a diagonal line of the pantograph that is the parallelogram have applied thereto a voltage differing in phase by 180° from another set of the electrodes disposed opposite to another set of the oscillators along an extension direction of another diagonal line of the pantograph. At least two of the MEMS resonators are connected so as to share one oscillator.

Dependencies are inferred from the claim text.