Time base comprising an integrated micromechanical tuning fork resonator
AssigneeETA SA Manufacture Horlogere Suisse
InventorsMetin Giousouf, Heinz Kück, Rainer Platz
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AssigneeETA SA Manufacture Horlogere Suisse
InventorsMetin Giousouf, Heinz Kück, Rainer Platz
Estimating the term…
There is described a time base comprising a resonator (4) and an integrated electronic circuit (3) for driving the resonator into oscillation and for producing, in response to this oscillation, a signal having a determined frequency. The resonator is an integrated micromechanical tuning fork resonator (4) supported above a substrate (2) and adapted to oscillate in a plane substantially parallel to the substrate. The tuning fork resonator comprises a base member (5) extending substantially perpendicularly from the substrate, a free-standing oscillating structure (6) connected to the base member and including at least a first pair of substantially parallel fork tines (7, 8) and an electrode structure (9) disposed adjacent to the fork tines and connected to the integrated electronic circuit.
Time base comprising a resonator (4) and an integrated electronic circuit (3) for driving said resonator (4) into oscillation and for producing, in response to said oscillation, a signal having a determined frequency, characterised in that said resonator is an integrated micromechanical tuning fork resonator (4) supported above a substrate (2) and adapted to oscillate, according to a first oscillation mode, in a plane substantially parallel to said substrate (2), said tuning fork resonator (4) comprising:
Dependencies are inferred from the claim text.