H01S 5/0203
Etching
Official title: {Etching}
H01S5/0203 (Etching) appears on 195 US grants and 183 published applications in this corpus.
Search patents in H01S- Granted patents
- 195
- Published applications
- 183
- Assignees
- 92
- Inventors
- 344
- Latest grant
- 6 Oct 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1981 | 1 | 0 |
| 1982 | 0 | 0 |
| 1983 | 0 | 0 |
| 1984 | 0 | 0 |
| 1985 | 0 | 0 |
| 1986 | 0 | 0 |
| 1987 | 1 | 0 |
| 1988 | 3 | 0 |
| 1989 | 0 | 0 |
| 1990 | 3 | 0 |
| 1991 | 2 | 0 |
| 1992 | 1 | 0 |
| 1993 | 4 | 0 |
| 1994 | 4 | 0 |
| 1995 | 4 | 0 |
| 1996 | 3 | 0 |
| 1997 | 3 | 0 |
| 1998 | 1 | 0 |
| 1999 | 2 | 0 |
| 2000 | 1 | 0 |
| 2001 | 3 | 0 |
| 2002 | 1 | 3 |
| 2003 | 0 | 4 |
| 2004 | 4 | 2 |
| 2005 | 2 | 1 |
| 2006 | 2 | 3 |
| 2007 | 0 | 1 |
| 2008 | 0 | 1 |
| 2009 | 1 | 6 |
| 2010 | 1 | 3 |
| 2011 | 3 | 4 |
| 2012 | 8 | 3 |
| 2013 | 2 | 6 |
| 2014 | 3 | 8 |
| 2015 | 7 | 12 |
| 2016 | 12 | 5 |
| 2017 | 11 | 12 |
| 2018 | 14 | 9 |
| 2019 | 8 | 10 |
| 2020 | 19 | 20 |
| 2021 | 13 | 15 |
| 2022 | 11 | 15 |
| 2023 | 13 | 14 |
| 2024 | 10 | 10 |
| 2025 | 9 | 9 |
| 2026 | 5 | 7 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
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Most cited
By later US patents
- Method of passivating etched mirror facets of semiconductor laser diodes152US 5,177,031 AInternational Business Machines Corporation · 1993
- Optoelectronic device with improved light extraction106US 6,746,889 B1Emcore Corporation · 2004
- Manufacturable RGB display based on thin film gallium and nitrogen containing light emitting diodes92US 10,002,928 B1Soraa Laser Diode, Inc. · 2018
- Manufacturable RGB display based on thin film gallium and nitrogen containing light emitting diodes85US 9,653,642 B1Soraa Laser Diode, Inc. · 2017
- Manufacturable laser diode59US 9,379,525 B2Soraa Laser Diode, Inc. · 2016