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US 12,538,537 B2Granted
Manufacturable gallium containing electronic devices
AssigneeKYOCERA SLD Laser, Inc.
InventorsJames W. Raring, Nicholas J. Pfister
Life of this patent
Estimating the term…
Abstract
Electronic devices are formed on donor substrates and transferred to carrier substrates by forming bonding regions on the electronic devices and bonding the bonding regions to a carrier substrate. The transfer process may include forming anchors and removing sacrificial regions.
Claims6
A carrier substrate configured with circuitry for distributing electronic signals or current, comprising:
- a plurality of electronic devices arranged in an array overlaying a surface region of the carrier substrate, wherein each of a first portion of the plurality of electronic devices include:
- gallium containing device layers of epitaxial material, the epitaxial material comprising at least an intrinsic-type or unintentionally doped gallium containing region or at least an n-type gallium containing region or at least a p-type gallium containing region or at least a combination of one or more of the intrinsic-type or unintentionally doped gallium containing region, the n-type gallium containing region, or the p-type gallium containing region;
- and
- one or more contact regions overlying the surface region of the carrier substrate, a surface region of the one or more contact regions contacting and bonded to a surface region of one or more metal contact regions of each electronic device, the one or more metal contact regions configured to provide an electrical coupling with at least one of the gallium containing device layers;
- and wherein each of a second portion of the plurality of electronic devices are different types of electronic devices than the first portion of the plurality of electronic devices.
2 more elements
Dependencies are inferred from the claim text.