H01J 37/32605
Removable or replaceable electrodes or electrode systems
Official title: {Removable or replaceable electrodes or electrode systems}
H01J37/32605 (Removable or replaceable electrodes or electrode systems) appears on 49 US grants and 62 published applications in this corpus.
Search patents in H01J- Granted patents
- 49
- Published applications
- 62
- Assignees
- 28
- Inventors
- 150
- Latest grant
- 7 Oct 2025
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1986 | 1 | 0 |
| 1987 | 0 | 0 |
| 1988 | 0 | 0 |
| 1989 | 0 | 0 |
| 1990 | 0 | 0 |
| 1991 | 0 | 0 |
| 1992 | 0 | 0 |
| 1993 | 0 | 0 |
| 1994 | 0 | 0 |
| 1995 | 0 | 0 |
| 1996 | 0 | 0 |
| 1997 | 0 | 0 |
| 1998 | 0 | 0 |
| 1999 | 1 | 0 |
| 2000 | 0 | 0 |
| 2001 | 0 | 0 |
| 2002 | 0 | 0 |
| 2003 | 0 | 5 |
| 2004 | 1 | 0 |
| 2005 | 2 | 2 |
| 2006 | 1 | 2 |
| 2007 | 0 | 1 |
| 2008 | 2 | 1 |
| 2009 | 0 | 5 |
| 2010 | 1 | 6 |
| 2011 | 1 | 3 |
| 2012 | 10 | 7 |
| 2013 | 4 | 5 |
| 2014 | 2 | 5 |
| 2015 | 5 | 2 |
| 2016 | 3 | 3 |
| 2017 | 1 | 5 |
| 2018 | 3 | 1 |
| 2019 | 3 | 2 |
| 2020 | 2 | 0 |
| 2021 | 3 | 4 |
| 2022 | 1 | 0 |
| 2023 | 0 | 1 |
| 2024 | 1 | 1 |
| 2025 | 1 | 0 |
| 2026 | 0 | 1 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- Removable showerhead faceplate for semiconductor processing tools7 Oct 2025US 12,435,418 B2Lam Research Corporation
- Plasma processing apparatus and wear amount measurement method9 Jul 2024US 12,033,838 B2Tokyo Electron Limited
- Mode-switching plasma systems and methods of operating thereof15 Feb 2022US 11,251,021 B2Tokyo Electron Limited
- Atomic layer deposition apparatus13 Jul 2021US 11,062,883 B2The Japan Steel Works, Ltd.
- Mode-switching plasma systems and methods of operating thereof2 Feb 2021US 10,910,196 B1Tokyo Electron Limited
- Substrate processing device and inner chamber assembly12 Mar 2026US 2026/0074160 A1Tokyo Electron Limited
- Plasma processing system and plasma processing apparatus5 Sep 2024US 2024/0297025 A1Tokyo Electron Limited
- Removable showerhead faceplate for semiconductor processing tools7 Sep 2023US 2023/0279547 A1Lam Research Corporation
- Plasma processing apparatus and wear amount measurement method30 Sep 2021US 2021/0305027 A1Tokyo Electron Limited
- Mode-Switching Plasma Systems and Methods of Operating Thereof20 May 2021US 2021/0151296 A1Tokyo Electron Limited
Most cited
By later US patents
- Method of joining components for a composite showerhead electrode assembly for a plasma processing apparatus529US 8,484,846 B2Lam Research Corporation · 2013
- Plasma reactor removable insert273US 4,585,920 ATegal Corporation · 1986
- Gasket with positioning feature for clamped monolithic showerhead electrode166US 8,272,346 B2Lam Research Corporation · 2012
- Clamped monolithic showerhead electrode64US 8,221,582 B2Lam Research Corporation · 2012
- Method of and apparatus for microwave-plasma production43US 5,874,705 AEA Technology Limited · 1999