Mode-switching plasma systems and methods of operating thereof

A plasma processing apparatus comprising:

• a plasma processing chamber;
• a resonant coil disposed adjacent to the plasma processing chamber, the resonant coil comprising a length L measured along a coiled path of the resonant coil;
• a power tap located substantially at a distance L/2 measured from a first end along the resonant coil;
• a controller configured to switch between a first electrical path and a second electrical path by signaling one or more retractable electrodes to extend and make electrical contact with the resonant coil;
• wherein the first electrical path couples the power tap to a power supply and couples a first position on the resonant coil to a reference potential node;
• and
• wherein the second electrical path couples the power tap to the power supply and couples a second position on the resonant coil to the reference potential node.

A method of plasma processing, the method comprising:

• sustaining a first plasma in a plasma processing chamber during a first operational mode by extending a first retractable electrode to make electrical contact with a resonant coil to couple a first contact region of the resonant coil to a reference potential;
• switching from the first operational mode to a second operational mode using a controller by retracting the first retractable electrode from the first contact region and extending the first retractable electrode or a second retractable electrode to make electrical contact with the resonant coil to couple a second contact region of the resonant coil to the reference potential;
• and
• sustaining a second plasma in the plasma processing chamber during the second operation mode.