Back to results
US 4,585,920 AGranted
Plasma reactor removable insert
AssigneeTegal Corporation
InventorsJosef T. Hoog, James W. Mitzel
Life of this patent
Estimating the term…
Abstract
An improved plasma reaction chamber is described in which the interior electrode is readily removed. The interior electrode may comprise a variety of materials, including metallized plastic, thus enabling a disposable electrode and a greater variety of plasmas to be used.
Claims21
Planar RF plasma reactor apparatus comprising:
- a frame member having an aperture therein;
- a shell secured to said frame about said aperture;
- an upper electrode which fits within said shell, at least a portion of said electrode being electrically coupled to said shell;
- retaining means attached to said shell for holding said electrode in place;
- and
- wherein said aperture is larger than said electrode in at least one dimension for enbaling removal of said electrode through said aperture without separating said shell and said frame.
3 more elements
An easily removed electrode for a planar RF plasma reactor comprising:
- a plain electrode member having a first and second major surfaces;
- said member defining a first and a second plurality of bores;
- said first plurality of bores extending from one major surface to the other, in a predetermined pattern in the central portion of said members, for gas flow in a first direction;
- a reduced thikcness portion about the periphery of said member;
- and
- said second pluraltiy of bores being disposed about the periphery of said member in said reduced thickness portion for gas flow in a second direction.
3 more elements
Dependencies are inferred from the claim text.