H01J 2237/24475
Scattered electron detectors
H01J2237/24475 (Scattered electron detectors) appears on 298 US grants and 343 published applications in this corpus.
Search patents in H01J- Granted patents
- 298
- Published applications
- 343
- Assignees
- 108
- Inventors
- 764
- Latest grant
- 11 Aug 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1978 | 1 | 0 |
| 1979 | 1 | 0 |
| 1980 | 2 | 0 |
| 1981 | 1 | 0 |
| 1982 | 0 | 0 |
| 1983 | 1 | 0 |
| 1984 | 1 | 0 |
| 1985 | 0 | 0 |
| 1986 | 1 | 0 |
| 1987 | 1 | 0 |
| 1988 | 2 | 0 |
| 1989 | 0 | 0 |
| 1990 | 4 | 0 |
| 1991 | 2 | 0 |
| 1992 | 2 | 0 |
| 1993 | 3 | 0 |
| 1994 | 1 | 0 |
| 1995 | 2 | 0 |
| 1996 | 0 | 0 |
| 1997 | 1 | 0 |
| 1998 | 1 | 0 |
| 1999 | 0 | 0 |
| 2000 | 0 | 0 |
| 2001 | 1 | 0 |
| 2002 | 1 | 2 |
| 2003 | 0 | 2 |
| 2004 | 3 | 5 |
| 2005 | 3 | 2 |
| 2006 | 1 | 11 |
| 2007 | 7 | 3 |
| 2008 | 6 | 7 |
| 2009 | 5 | 9 |
| 2010 | 7 | 7 |
| 2011 | 7 | 9 |
| 2012 | 5 | 10 |
| 2013 | 10 | 14 |
| 2014 | 15 | 13 |
| 2015 | 12 | 13 |
| 2016 | 7 | 12 |
| 2017 | 11 | 12 |
| 2018 | 16 | 15 |
| 2019 | 16 | 25 |
| 2020 | 23 | 25 |
| 2021 | 24 | 35 |
| 2022 | 25 | 20 |
| 2023 | 24 | 33 |
| 2024 | 12 | 17 |
| 2025 | 16 | 29 |
| 2026 | 14 | 13 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- Detector substrate for use in a charged particle multi-beam assessment tool11 Aug 2026US 12,706,272 B2ASML Netherlands B. V.
- Multiple electron beam optics21 Jul 2026US 12,688,993 B2Applied Materials Israel Ltd.
- Objective lens and charged particle beam apparatus including same30 Jun 2026US 12,671,052 B2Korea Research Institute of Standards and Science
- Proximity-electrode, charged particle beam device and method for inspecting and/or imaging a sample16 Jun 2026US 12,658,401 B2ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- Orientation tool for electron backscatter diffraction21 Apr 2026US 12,609,275 B2GM Global Technology Operations LLC
- Charged particle beam device17 Sep 2026US 2026/0279717 A1Samsung Electronics Co., Ltd.
- System for the continuous-wave laser processing and sem characterisation of a sample20 Aug 2026US 2026/0245827 A1
- Substrate inspection apparatus and substrate inspection system23 Jul 2026US 2026/0213122 A1Samsung Electronics Co., Ltd.
- Systems and methods for analyzing a sample using charged particle beams and active pixel control sensors9 Jul 2026US 2026/0196438 A1FEI Company
- Split objective lens for electron beam to enhance topographical imaging2 Jul 2026US 2026/0188603 A1
Most cited
By later US patents
- Scanning electron microscope66US 6,847,038 B2Hitachi, Ltd. · 2005
- System for high resolution imaging and measurement of topographic and material features on a specimen62US 5,644,132 AOpan Technologies Ltd. · 1997
- Electron detector for use in a gaseous environment53US 4,897,545 AElectroScan Corporation · 1990
- Environmental scanning electron microscope43US 5,362,964 AElectroScan Corporation · 1994
- Environmental scanning electron microscope42US 5,412,211 AElectroScan Corporation · 1995