Objective lens and charged particle beam apparatus including same
AssigneeKorea Research Institute of Standards and Science
InventorsTakashi Ogawa, In Yong Park, Jeong Woong Lee
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Abstract
An objective lens for a charged particle beam apparatus that provides a charged particle beam to a sample, includes: a first electrode exposed to face a sample; a second electrode configured to focus a charged particle beam to the sample; a third electrode comprising a conical tip and a body extending from the tip; and a fourth electrode located in the body of the third electrode. Each of the first electrode, the second electrode, the third electrode, and the fourth electrode has a through-hole, and the charged particle beam is provided to the sample through the through-hole in response to a voltage applied.
Claims21
An objective lens for a charged particle beam apparatus that provides a charged particle beam to a sample, the objective lens comprising:
- a first electrode exposed to face a sample;
- a second electrode configured to focus a charged particle beam to the sample;
- a third electrode comprising a conical tip and a body extending from the tip;
- and
- a fourth electrode located in the body of the third electrode,
- wherein each of the first electrode, the second electrode, the third electrode, and the fourth electrode has a through-hole, and the charged particle beam is provided to the sample through the through-hole in response to a voltage applied,
- wherein each of the first electrode and second electrode comprises the conical tip and the body extending from the tip,
- the second electrode is located within the first electrode with a gap from the first electrode, and
- the third electrode is located within the second electrode with a gap from the second electrode.
An objective lens for a charged particle beam apparatus that provides a charged particle beam to a sample, the objective lens comprising:
- a first electrode comprising a conical tip and a body extending from the tip, the first electrode being exposed to face a sample;
- a second electrode comprising a conical tip and a body extending from the tip, exposed in the first electrode, and configured to focus a charged particle beam to the sample;
- a third electrode comprising a conical tip and a body extending from the tip, the third electrode being located in the second electrode;
- and
- a fourth electrode located in the body of the third electrode,
- wherein each of the first electrode, the second electrode, the third electrode, and the fourth electrode has a through-hole, and the charged particle beam is provided to the sample through the through-hole in response to an electric field generated by one or more voltages applied to at least one of the first electrode, the second electrode, the third electrode, and the fourth electrode.
A charged particle beam apparatus comprising:
- a charged particle source;
- one or more condenser lenses configured to focus a charged particle beam;
- an objective lens configured to imaging a sample by irradiating the sample with the charged particle beam;
- and
- a detector configured to detect secondary electrons and backscattered electrons generated from the sample,
- wherein the objective lens comprises:
- a first electrode comprising a conical tip having a through-hole and a body extending from the tip, the first electrode being exposed to face a sample;
- a second electrode comprising a conical tip having a through-hole and a body extending from the tip, exposed in the first electrode, and configured to focus a charged particle beam to the sample;
- a third electrode comprising a conical tip having a through-hole and a body extending from the tip, the third electrode being located in the second electrode;
- and
- a fourth electrode located in the body of the third electrode and having a through-hole.
Dependencies are inferred from the claim text.