H01J 2237/2444
Electron multiplier
Official title: Electron Multiplier
H01J2237/2444 (Electron multiplier) appears on 59 US grants and 53 published applications in this corpus.
Search patents in H01J- Granted patents
- 59
- Published applications
- 53
- Assignees
- 36
- Inventors
- 129
- Latest grant
- 9 May 2023
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1978 | 1 | 0 |
| 1979 | 0 | 0 |
| 1980 | 0 | 0 |
| 1981 | 0 | 0 |
| 1982 | 0 | 0 |
| 1983 | 0 | 0 |
| 1984 | 0 | 0 |
| 1985 | 0 | 0 |
| 1986 | 0 | 0 |
| 1987 | 0 | 0 |
| 1988 | 0 | 0 |
| 1989 | 0 | 0 |
| 1990 | 0 | 0 |
| 1991 | 1 | 0 |
| 1992 | 2 | 0 |
| 1993 | 0 | 0 |
| 1994 | 1 | 0 |
| 1995 | 1 | 0 |
| 1996 | 1 | 0 |
| 1997 | 1 | 0 |
| 1998 | 0 | 0 |
| 1999 | 1 | 0 |
| 2000 | 1 | 0 |
| 2001 | 0 | 1 |
| 2002 | 3 | 2 |
| 2003 | 0 | 0 |
| 2004 | 1 | 0 |
| 2005 | 0 | 1 |
| 2006 | 2 | 5 |
| 2007 | 2 | 2 |
| 2008 | 2 | 5 |
| 2009 | 4 | 5 |
| 2010 | 4 | 2 |
| 2011 | 1 | 5 |
| 2012 | 6 | 4 |
| 2013 | 3 | 2 |
| 2014 | 3 | 4 |
| 2015 | 6 | 1 |
| 2016 | 1 | 4 |
| 2017 | 3 | 1 |
| 2018 | 1 | 1 |
| 2019 | 2 | 0 |
| 2020 | 2 | 2 |
| 2021 | 0 | 3 |
| 2022 | 2 | 0 |
| 2023 | 1 | 0 |
| 2024 | 0 | 1 |
| 2025 | 0 | 0 |
| 2026 | 0 | 2 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Subgroups
Granted patents
Recent patents
- Method for detector equalization during the imaging of objects with a multi-beam particle microscope9 May 2023US 11,645,740 B2Carl Zeiss MultiSEM GmbH
- Charged particle beam device31 May 2022US 11,348,757 B2Hitachi High-Tech Corporation
- Charged particle optical apparatus for through-the-lens detection of particles15 Mar 2022US 11,276,547 B2Carl Zeiss Microscopy GmbH
- Charged particle optical apparatus for through-the-lens detection of particles8 Dec 2020US 10,861,670 B2Carl Zeiss Microscopy GmbH
- Charged particle beam device27 Oct 2020US 10,818,470 B2Hitachi High-Tech Corporation
- Secondary electron detector using a conductive ultra-thin membrane provided in an atmospheric pressure electron microscope6 Aug 2026US 2026/0229450 A1Coxem Co., Ltd
- Mcp detector and analysis device23 Jul 2026US 2026/0213123 A1Hamamatsu Photonics K.K.
- Fast framing electron detector for 4d-stem16 May 2024US 2024/0162002 A1Dectris AG
- Charged Particle Beam Device2 Sep 2021US 2021/0272768 A1Hitachi High-Tech Corporation
- Method for detector equalization during the imgaging of objects with a multi-beam particle microscope24 Jun 2021US 2021/0192700 A1Carl Zeiss MultiSEM GmbH
Most cited
By later US patents
- Detection system for precision measurements and high resolution inspection of high aspect ratio structures using particle beam devices40US 5,493,116 AMetrologix, Inc. · 1996
- Method and an apparatus of an inspection system using an electron beam25US 6,348,690 B1Hitachi, Ltd. · 2002
- Charged particle extraction arrangement23US 5,164,594 AKratos Analytical Limited · 1992
- Detection apparatus for detecting charged particles, methods for detecting charged particles and mass spectrometer20US 8,680,481 B2Thermo Fisher Scientific (Bremen) GmbH · 2014
- Method and an apparatus of an inspection system using an electron beam12US 6,452,178 B2Hitachi, Ltd. · 2002