Charged particle beam device

A charged particle beam device, comprising:

• a deflection unit that deflects a charged particle beam emitted from a charged particle source to irradiate a sample;
• a reflection plate that reflects secondary electrons generated from the sample;
• and
• a control unit that controls the deflection unit based on an image generated by detecting the secondary electron reflected from the reflection plate, wherein
• the deflection unit includes an electromagnetic deflection unit that electromagnetically performs scanning with the charged particle beam by a magnetic field and an electrostatic deflection unit that electrostatically performs scanning with the charged particle beam by an electric field,
• the control unit controls the electromagnetic deflection unit and the electrostatic deflection unit, superimposes an electromagnetic deflection vector generated by the electromagnetic scanning and an electrostatic deflection vector generated by the electrostatic scanning, and controls a trajectory of the charged particle beam,
• the control unit performs control to superimpose the electromagnetic deflection vector and the electrostatic deflection vector and scan the sample with the charged particle beam from a first scanning position to a second scanning position, and
• the control unit performs control so that the electrostatic deflection vector is in opposite directions in the first scanning position and the deflection vector is in the same direction in the first scanning position and the second scanning position.