Fast framing electron detector for 4d-stem

Electron microscope, comprising

• a source for generating an electron beam,
• a sample holder for holding a sample to be investigated in the electron beam, and
• a radiation detector according to any of the preceding claims, arranged to detect electrons transmitted through or scattered by the sample when arranged in the electron beam,
• wherein the electron microscope is a 4D-STEM device.

Method of manufacturing a radiation detector, comprising the steps of

• providing at least one sensor tile with sensor material sensitive to the radiation, the sensor tile extending in a planar dimension with a front side facing incident radiation, and a back side opposite the front side,
• forming multiple contacts of electrically conducting material on the back side of the sensor tile in contact with the sensor material, thereby defining sensor pixels, forming a front electrode on the front side of the sensor tile,
• forming a braking layer on the front electrode covering at least 10×10 sensor pixels or at least 5 mm2 of the front electrode,
• providing at least one ASIC comprising a set of readout circuits,
• electrically connecting the contacts with the readout circuits for enabling each readout circuit to process a signal received from the sensor pixel the readout circuit is electrically connected to.