H01J 2237/053
Electrostatic
Official title: electrostatic
H01J2237/053 (Electrostatic) appears on 80 US grants and 74 published applications in this corpus.
Search patents in H01J- Granted patents
- 80
- Published applications
- 74
- Assignees
- 55
- Inventors
- 156
- Latest grant
- 10 Mar 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1987 | 1 | 0 |
| 1988 | 1 | 0 |
| 1989 | 1 | 0 |
| 1990 | 0 | 0 |
| 1991 | 0 | 0 |
| 1992 | 2 | 0 |
| 1993 | 0 | 0 |
| 1994 | 1 | 0 |
| 1995 | 0 | 0 |
| 1996 | 2 | 0 |
| 1997 | 1 | 0 |
| 1998 | 0 | 0 |
| 1999 | 0 | 0 |
| 2000 | 0 | 0 |
| 2001 | 0 | 0 |
| 2002 | 0 | 0 |
| 2003 | 0 | 0 |
| 2004 | 1 | 2 |
| 2005 | 2 | 1 |
| 2006 | 3 | 5 |
| 2007 | 2 | 3 |
| 2008 | 3 | 0 |
| 2009 | 0 | 2 |
| 2010 | 2 | 5 |
| 2011 | 4 | 3 |
| 2012 | 5 | 6 |
| 2013 | 6 | 3 |
| 2014 | 4 | 3 |
| 2015 | 4 | 1 |
| 2016 | 3 | 1 |
| 2017 | 2 | 6 |
| 2018 | 6 | 6 |
| 2019 | 4 | 3 |
| 2020 | 6 | 6 |
| 2021 | 5 | 5 |
| 2022 | 1 | 4 |
| 2023 | 2 | 2 |
| 2024 | 1 | 5 |
| 2025 | 2 | 1 |
| 2026 | 3 | 1 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Subgroups
Granted patents
Recent patents
- Hybrid apparatus, system and techniques for mass analyzed ion beam10 Mar 2026US 12,573,579 B2APPLIED Materials.Inc.
- Angle-resolving photoelectron spectrometer and method20 Jan 2026US 12,529,664 B2Scienta Omicron AB
- Programmable and tunable cylindrical deflector analyzers13 Jan 2026US 12,523,784 B2Rensselaer Polytechnic Institute
- Multiple secondary electron beam alignment method, multiple secondary electron beam alignment apparatus, and electron beam inspection apparatus24 Jun 2025US 12,339,241 B2NuFlare Technology, Inc.
- Electron gun and electron microscope4 Feb 2025US 12,217,928 B2Hitachi High-Tech Corporation
- Electron gun and electron microscope30 Apr 2026US 2026/0120990 A1Hitachi High-Tech Corporation
- Electrostatic energy filter module11 Sep 2025US 2025/0285825 A1Applied Materials Israel Ltd.
- Apparatus, system and techniques for mass analyzed ion beam10 Oct 2024US 2024/0339287 A1APPLIED Materials.Inc.
- Hybrid apparatus, system and techniques for mass analyzed ion beam10 Oct 2024US 2024/0339288 A1APPLIED Materials.Inc.
- Programmable and tunable cylindrical deflector analyzers16 May 2024US 2024/0159919 A1Rensselaer Polytechnic Institute
Most cited
By later US patents
- Scanning electron microscope66US 6,847,038 B2Hitachi, Ltd. · 2005
- Two-grid ion energy analyzer and methods of manufacturing and operating47US 7,777,179 B2Tokyo Electron Limited · 2010
- Apparatus and method for E-beam dark field imaging45US 7,141,791 B2KLA-Tencor Technologies Corporation · 2006
- Ion purification for plasma ion implantation39US 5,289,010 AWisconsin Alumni Research Foundation · 1994
- Electron detector28US 4,658,137 ATexas Instruments Incorporated · 1987