Electron gun and electron microscope
AssigneeHitachi High-Tech Corporation
InventorsHideo Morishita, Takashi Ohshima, Tatsuro Ide, Naohiro Kohmu, Toshihide Agemura, Yoichi Ose, Junichi Katane
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AssigneeHitachi High-Tech Corporation
InventorsHideo Morishita, Takashi Ohshima, Tatsuro Ide, Naohiro Kohmu, Toshihide Agemura, Yoichi Ose, Junichi Katane
Estimating the term…
The electron gun is provided with a first anode electrode and a second anode electrode to generate an acceleration and deceleration electric field. A lens electric field makes it possible to irradiate a sample with an electron beam emitted from a part outside an optical axis of the photoelectric film without being blocked by a differential exhaust diaphragm. A wide range of electron beams off-optical axis can be used even in a high-brightness photocathode that requires high vacuum. As a result, the photoelectric film and the electron gun can be extended in life, can be stabilized, and can be increased in brightness. Further, it is possible to facilitate a control of emitting electron beams from a plurality of positions on the photoelectric film, a timing control of emitting electron beams from a plurality of positions, a condition control of an electron beam in an electron microscope using electron beams.
An electron gun comprising:
An electron microscope comprising:
Dependencies are inferred from the claim text.