G05B 2219/2602
Wafer processing
G05B2219/2602 (Wafer processing) appears on 80 US grants and 102 published applications in this corpus.
Search patents in G05B- Granted patents
- 80
- Published applications
- 102
- Assignees
- 51
- Inventors
- 232
- Latest grant
- 6 Oct 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1996 | 1 | 0 |
| 1997 | 0 | 0 |
| 1998 | 0 | 0 |
| 1999 | 0 | 0 |
| 2000 | 1 | 0 |
| 2001 | 1 | 0 |
| 2002 | 0 | 0 |
| 2003 | 1 | 1 |
| 2004 | 0 | 0 |
| 2005 | 0 | 0 |
| 2006 | 0 | 6 |
| 2007 | 1 | 0 |
| 2008 | 4 | 1 |
| 2009 | 0 | 0 |
| 2010 | 1 | 0 |
| 2011 | 0 | 0 |
| 2012 | 1 | 1 |
| 2013 | 0 | 2 |
| 2014 | 1 | 2 |
| 2015 | 1 | 9 |
| 2016 | 1 | 3 |
| 2017 | 5 | 2 |
| 2018 | 5 | 5 |
| 2019 | 6 | 9 |
| 2020 | 5 | 6 |
| 2021 | 4 | 11 |
| 2022 | 6 | 11 |
| 2023 | 10 | 12 |
| 2024 | 9 | 6 |
| 2025 | 10 | 8 |
| 2026 | 6 | 7 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- Method and system to train and apply a neural network to achieve rapid adaptive initialization of solver software6 Oct 2026US 12,754,534 B2APPLIED Materials.Inc.
- State management system, state management method, and storage medium29 Sep 2026US 12,748,403 B2Tokyo Electron Limited
- Method, apparatus, and system with abnormality determination4 Aug 2026US 12,699,382 B2Samsung Electronics Co., Ltd.
- Transport apparatus and adapter pendant10 Mar 2026US 12,575,375 B2Brooks Automation US, LLC
- Teaching method of transfer equipment and teaching processing system of transfer equipment3 Mar 2026US 12,566,413 B2Semes Co., Ltd.
- Transport apparatus and adapter pendant16 Jul 2026US 2026/0206540 A1Brooks Automation US, LLC
- Machine learning platform for substrate processing2 Jul 2026US 2026/0186477 A1APPLIED Materials.Inc.
- Information processing method, information processing apparatus, control method for semiconductor manufacturing system, semiconductor manufacturing system, semiconductor manufacturing method, and recording medium25 Jun 2026US 2026/0178020 A1Canon Kabushiki Kaisha
- Optimization of fabrication processes16 Apr 2026US 2026/0104696 A1Lam Research Corporation
- Input/output (io) handling during update process for manufacturing system controller2 Apr 2026US 2026/0093223 A1APPLIED Materials.Inc.
Most cited
By later US patents
- Apparatus and method for endpoint control and plasma monitoring27US 6,535,779 B1APPLIED Materials.Inc. · 2003
- Manufacturing backup system26US 6,216,051 B1NEC Electronics Corporation · 2001
- Method and apparatus for resetting individual processes in a control system21US 5,555,177 AOntrak Systems, Inc. · 1996
- System and method for integrated data transfer, archiving and purging of semiconductor wafer data13US 7,346,883 B2KLA-Tencor Technologies Corporation · 2008
- System and method for searching for patterns of semiconductor wafer features in semiconductor wafer data12US 7,343,583 B2KLA-Tencor Technologies Corporation · 2008