Information processing method, information processing apparatus, control method for semiconductor manufacturing system, semiconductor manufacturing system, semiconductor manufacturing method, and recording medium

An information processing apparatus comprising:

• a controller configured to perform processing to simulate a processing order of a plurality of lots in a manufacturing facility for manufacturing semiconductor,
• wherein the controller is configured to execute:
• a first estimation processing to estimate a first required time for a first lot to be released from a queue time limit;
• a second estimation processing to estimate a second required time for a second lot to be released from the queue time limit;
• a first determination processing to determine whether or not it is possible to start a first processing in the manufacturing facility for the first lot, on a basis of the first required time and a first maximum queue time in which it is allowed to leave the first lot unprocessed;
• a second determination processing to determine whether or not it is possible to start the first processing in the manufacturing facility for the second lot, on a basis of the second required time and a second maximum queue time in which it is allowed to leave the second lot unprocessed;
• and
• an order determination processing to determine to suspend start of the first processing for the first lot and to start the first processing for the second lot, in a case where it has been determined in the first determination processing that it is possible to start the first processing for the first lot, it has been determined in the second determination processing that it is possible to start the first processing for the second lot, and a manufacture priority of the second lot is higher than a manufacture priority of the first lot.

A control method for a semiconductor manufacturing system including a manufacturing facility including a plurality of processing apparatuses configured to perform respective processing for manufacturing semiconductor, a management apparatus configured to manage the plurality of processing apparatuses, and an information processing apparatus including a controller configured to perform processing to simulate a processing order of a plurality of lots in the manufacturing facility and output information of the processing order to the management apparatus, the control method comprising:

• a first estimation step in which the controller estimates a first required time for a first lot to be released from a queue time limit;
• a second estimation step in which the controller estimates a second required time for a second lot to be released from the queue time limit;
• a first determination step in which the controller determines whether or not it is possible to start a first processing in the manufacturing facility for the first lot, on a basis of the first required time and a first maximum queue time in which it is allowed to leave the first lot unprocessed;
• a second determination step in which the controller determines whether or not it is possible to start the first processing in the manufacturing facility for the second lot, on a basis of the second required time and a second maximum queue time in which it is allowed to leave the second lot unprocessed;
• and
• an order determination step in which the controller determines to suspend start of the first processing for the first lot and to start the first processing for the second lot, in a case where it has been determined in the first determination step that it is possible to start the first processing for the first lot, it has been determined in the second determination step that it is possible to start the first processing for the second lot, and a manufacture priority of the second lot is higher than a manufacture priority of the first lot.

A semiconductor manufacturing system comprising:

• a manufacturing facility including a plurality of processing apparatuses configured to perform respective processing for manufacturing semiconductor;
• a management apparatus configured to manage the plurality of processing apparatuses;
• and
• an information processing apparatus including a controller configured to perform processing to simulate a processing order of a plurality of lots in the manufacturing facility and output information of the processing order to the management apparatus,
• wherein the controller is configured to execute:
• a first estimation processing to estimate a first required time for a first lot to be released from a queue time limit;
• a second estimation processing to estimate a second required time for a second lot to be released from the queue time limit;
• a first determination processing to determine whether or not it is possible to start a first processing in the manufacturing facility for the first lot, on a basis of the first required time and a first maximum queue time in which it is allowed to leave the first lot unprocessed;
• a second determination processing to determine whether or not it is possible to start the first processing in the manufacturing facility for the second lot, on a basis of the second required time and a second maximum queue time in which it is allowed to leave the second lot unprocessed;
• and
• an order determination processing to determine to suspend start of the first processing for the first lot and to start the first processing for the second lot, in a case where it has been determined in the first determination processing that it is possible to start the first processing for the first lot, it has been determined in the second determination processing that it is possible to start the first processing for the second lot, and a manufacture priority of the second lot is higher than a manufacture priority of the first lot.