Method and apparatus for resetting individual processes in a control system
AssigneeOntrak Systems, Inc.
InventorMark A. Simmons
Life of this patent
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Abstract
A method and apparatus for resetting a process in a control system. The steps in this method involve identifying a process for a portion of a double-sided wafer scrubber. Then, the process is reset.
Claims16
A wafer processing system comprising:
- a plurality of stations;
- a processor being coupled in communications with said plurality of station, said processor controlling said plurality of station, said processor executing a plurality of processes that include a first process for resetting a second process of said plurality of processes, said second process controlling an operation of one of said plurality of stations, said processor transmitting a signal from said first process to said second process, wherein the processor starts a new process in response to the signal to replace said second process;
- and
- a memory for storing information for said plurality of processes, said memory being coupled in communications with said processor.
A device for resetting a process in a wafer processing system having a first station and a second station, said device comprising:
- a memory for storing data associated with a plurality of processes;
- a processor, being coupled to said memory, said processor executing a first process and a second process of said plurality of processes, said first process for controlling an operation of said first station, said first process having an error, said processor resetting said first process having said error while continuing to execute said second process.
A method of allowing all but a first station of a plurality of stations to continue processing wafers in a double-sided wafer scrubber, said double-sided wafer scrubber including a memory and a processor, said processor coupled in communications with said memory and said plurality of stations, said method comprising the steps of:
- said processor executing a first process for controlling said first station:
- said processor receiving a stop first station signal;
- and
- said processor stopping only said first station from further processing by said processor transmitting a stop signal to said first process, wherein said step of stopping said first station includes:
- said processor accessing an ID of said first process;
- said processor ceasing execution of said first process using said ID.
A method of controlling a portion of a double-sided wafer scrubber, said double-sided wafer scrubber including a processor, a memory, a station and a second station, said processor being coupled in communications with said memory, said station and said second station, said processor for communicating control signals to said station and said second station, said memory for storing a program and data for use by said processor;
- said processor executing a process controlling said station;
- said processor executing a second process controlling said second station;
- said processor receiving a signal to reset said station;
- said processor resetting said process causing only said station to be reset.
Dependencies are inferred from the claim text.