Teaching method of transfer equipment and teaching processing system of transfer equipment

A transfer position teaching system of a transfer robot, comprising

• a vision camera installed on an arm of a transfer robot disposed in a home position of a transfer chamber and configured to acquire and output a first image in which a surrounding area is photographed;
• an image analysis unit configured to read the first image acquired from the vision camera to identify a transfer target object preset to a teaching target object and generate a first position coordinate in which the transfer robot is located in front of the identified transfer target object;
• and
• a controller configured to control a first movement of the transfer robot from the home position to the first position coordinate received from the image analysis unit,
• the vision camera further configured to acquire and output a second image including the transfer target object based on the transfer robot being in the first position coordinate, the vision camera facing a first direction relative to a base of the transfer robot during acquiring the first image and a second direction relative to the base of the transfer robot during acquiring the second image, the first and second directions being different,
• the image analysis unit further configured to read the second image and generate a second position coordinate, and
• the controller configured to control a second movement of the transfer robot from the first position coordinate to the second position coordinate received from the image analysis unit.