State management system, state management method, and storage medium

A state management method comprising:

• continuously acquiring data accumulated in each of a plurality of substrate processing apparatuses in real time during operation of the plurality of substrate processing apparatus, wherein the plurality of substrate processing apparatuses are connected via a network;
• executing, in each predetermined cycle during the operation, a processing of calculating a specific index indicating a state of each substrate processing apparatus of the plurality of substrate processing apparatuses using a plurality of types of data among the data acquired in the acquiring, wherein the executing includes calculating the specific index using a health level calculation unit, an operation rate calculation unit, and a production rate calculation unit;
• displaying time-series data indicating a time-series change in the specific index calculated in the executing for each substrate processing apparatus of the plurality of substrate processing apparatuses;
• and
• calculating a predictive value of a time-series change in the specific index in a future for each substrate processing apparatus of the plurality of substrate processing apparatuses, based on the time-series data of the specific index, wherein the processing in the executing includes:
• calculating a first index indicating a degree of normality of each substrate processing apparatus by combining a plurality of types of data selected in advance from among the acquired data;
• calculating a second index indicating a rate at which each substrate processing apparatus was in the operable state, by extracting data indicating whether or not each substrate processing apparatus has been in an operable state from among the acquired data;
• and
• calculating a third index indicating productivity of each substrate processing apparatus by extracting data indicating a product produced by the substrate processing apparatus from among the acquired data, and
• wherein the displaying the time-series data includes a processing of displaying the time-series data having at least one of the first index, second index, and third index as the specific index,
• and utilizing the time-series data having at least one of the first index, second index, and third index as the specific index to control the plurality of substate processing apparatuses.

A non-transitory computer-readable storage medium having stored therein a program that causes a computer to execute a process including:

• continuously acquiring data accumulated in each of a plurality of substrate processing apparatuses in real time during operation of the plurality of substrate processing apparatuses, wherein the plurality of substrate processing apparatuses are connected via a network;
• executing, in each predetermined cycle during the operation, a processing of calculating a specific index indicating a state of each substrate processing apparatus of the plurality of substrate processing apparatuses using a plurality of types of data among the data acquired in the acquiring, wherein the executing includes calculating the specific index using a health level calculation unit, an operation rate calculation unit, and a production rate calculation unit;
• displaying time-series data indicating a time-series change in the specific index calculated in the executing for each substrate processing apparatus of the plurality of substrate processing apparatuses;
• and
• calculating a predictive value of a time-series change in the specific index in a future for each substrate processing apparatus of the plurality of substrate processing apparatuses, based on the time-series data of the specific index, wherein the processing in the executing includes:
• calculating a first index indicating a degree of normality of each substrate processing apparatus by combining a plurality of types of data selected in advance from among the acquired data;
• calculating a second index indicating a rate at which each substrate processing apparatus was in the operable state, by extracting data indicating whether or not the substrate processing apparatus has been in an operable state from among the acquired data;
• and
• calculating a third index indicating productivity of each substrate processing apparatus by extracting data indicating a product produced by the substrate processing apparatus from among the acquired data, and
• wherein the displaying the time-series data includes a processing of displaying the time-series data having at least one of the first index, second index, and third index as the specific index,
• and utilizing the time-series data having at least one of the first index, second index, and third index as the specific index to control the plurality of substate processing apparatuses.