G02B 7/1815
With cooling or heating systems
Official title: {with cooling or heating systems (cooling arrangements for laser mirrors H01S3/0401)}
G02B7/1815 (With cooling or heating systems) appears on 330 US grants and 287 published applications in this corpus.
Search patents in G02B- Granted patents
- 330
- Published applications
- 287
- Assignees
- 162
- Inventors
- 702
- Latest grant
- 6 Oct 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1976 | 1 | 0 |
| 1977 | 4 | 0 |
| 1978 | 4 | 0 |
| 1979 | 4 | 0 |
| 1980 | 1 | 0 |
| 1981 | 3 | 0 |
| 1982 | 3 | 0 |
| 1983 | 9 | 0 |
| 1984 | 4 | 0 |
| 1985 | 5 | 0 |
| 1986 | 2 | 0 |
| 1987 | 6 | 0 |
| 1988 | 6 | 0 |
| 1989 | 3 | 0 |
| 1990 | 6 | 0 |
| 1991 | 12 | 0 |
| 1992 | 7 | 0 |
| 1993 | 2 | 0 |
| 1994 | 5 | 0 |
| 1995 | 4 | 0 |
| 1996 | 1 | 0 |
| 1997 | 1 | 0 |
| 1998 | 2 | 0 |
| 1999 | 4 | 0 |
| 2000 | 3 | 0 |
| 2001 | 2 | 2 |
| 2002 | 7 | 8 |
| 2003 | 3 | 7 |
| 2004 | 10 | 6 |
| 2005 | 4 | 7 |
| 2006 | 6 | 4 |
| 2007 | 2 | 6 |
| 2008 | 7 | 4 |
| 2009 | 2 | 3 |
| 2010 | 6 | 6 |
| 2011 | 5 | 11 |
| 2012 | 6 | 11 |
| 2013 | 4 | 8 |
| 2014 | 10 | 8 |
| 2015 | 8 | 17 |
| 2016 | 15 | 14 |
| 2017 | 13 | 9 |
| 2018 | 11 | 18 |
| 2019 | 15 | 14 |
| 2020 | 17 | 18 |
| 2021 | 14 | 15 |
| 2022 | 11 | 18 |
| 2023 | 10 | 22 |
| 2024 | 17 | 17 |
| 2025 | 14 | 20 |
| 2026 | 9 | 14 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- Process chamber with reflector6 Oct 2026US 12,754,392 B2APPLIED Materials.Inc.
- Optical element, optical arrangement and insert component15 Sep 2026US 12,736,773 B2Carl Zeiss SMT GmbH
- Microelectromechanical apparatus with heating element18 Aug 2026US 12,710,619 B2Carl Zeiss SMT GmbH
- Method for producing a mirror of a lithography system30 Jun 2026US 12,669,675 B2Carl Zeiss SMT GmbH
- EUV mirror with improved optical stability26 May 2026US 12,638,778 B2Taiwan Semiconductor Manufacturing Company.Ltd
- Euv mirror with improved optical stability10 Sep 2026US 2026/0267232 A1Taiwan Semiconductor Manufacturing Company.Ltd
- Lithography system comprising a measurement device18 Jun 2026US 2026/0169398 A1
- Reducing optical loss in high power laser applications18 Jun 2026US 2026/0171745 A1The Regents of the University of California
- Mems mirror array module28 May 2026US 2026/0147181 A1
- Mirror system, method for operating a mirror system, projection lens for a microlithographic projection exposure system, and computer program product21 May 2026US 2026/0140456 A1
Most cited
By later US patents
- Mirror assembly with heater element160US 7,400,435 B2Donnelly Corporation · 2008
- Self-supported, adjustable, condensation-free shower mirror135US 5,032,015 AShower Tek, Inc. · 1991
- Electrically heated air blower unit for defogging bathroom mirrors84US 4,988,847 A1991
- Interior rearview mirror assembly50US 8,258,433 B2Donnelly Corporation · 2012
- Polarization preserving reflector and method48US 4,746,202 ACoherent, Inc. · 1988