G02B 7/181
With means for compensating for changes in temperature or for controlling the
Official title: {with means for compensating for changes in temperature or for controlling the temperature; thermal stabilisation}
G02B7/181 (With means for compensating for changes in temperature or for controlling the) appears on 521 US grants and 505 published applications in this corpus.
Search patents in G02B- Granted patents
- 521
- Published applications
- 505
- Assignees
- 250
- Inventors
- 1,117
- Latest grant
- 6 Oct 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1976 | 1 | 0 |
| 1977 | 5 | 0 |
| 1978 | 4 | 0 |
| 1979 | 5 | 0 |
| 1980 | 1 | 0 |
| 1981 | 5 | 0 |
| 1982 | 3 | 0 |
| 1983 | 10 | 0 |
| 1984 | 4 | 0 |
| 1985 | 5 | 0 |
| 1986 | 2 | 0 |
| 1987 | 7 | 0 |
| 1988 | 6 | 0 |
| 1989 | 3 | 0 |
| 1990 | 6 | 0 |
| 1991 | 15 | 0 |
| 1992 | 7 | 0 |
| 1993 | 2 | 0 |
| 1994 | 5 | 0 |
| 1995 | 4 | 0 |
| 1996 | 2 | 0 |
| 1997 | 2 | 0 |
| 1998 | 3 | 0 |
| 1999 | 5 | 0 |
| 2000 | 3 | 0 |
| 2001 | 4 | 3 |
| 2002 | 7 | 9 |
| 2003 | 5 | 8 |
| 2004 | 11 | 7 |
| 2005 | 5 | 13 |
| 2006 | 12 | 14 |
| 2007 | 6 | 12 |
| 2008 | 12 | 6 |
| 2009 | 7 | 9 |
| 2010 | 11 | 13 |
| 2011 | 7 | 20 |
| 2012 | 10 | 15 |
| 2013 | 6 | 13 |
| 2014 | 17 | 15 |
| 2015 | 12 | 32 |
| 2016 | 22 | 28 |
| 2017 | 29 | 27 |
| 2018 | 27 | 28 |
| 2019 | 30 | 23 |
| 2020 | 23 | 27 |
| 2021 | 25 | 31 |
| 2022 | 23 | 40 |
| 2023 | 21 | 36 |
| 2024 | 28 | 26 |
| 2025 | 31 | 28 |
| 2026 | 15 | 22 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Subgroups
Granted patents
Recent patents
- Process chamber with reflector6 Oct 2026US 12,754,392 B2APPLIED Materials.Inc.
- Optical element, optical arrangement and insert component15 Sep 2026US 12,736,773 B2Carl Zeiss SMT GmbH
- Microelectromechanical apparatus with heating element18 Aug 2026US 12,710,619 B2Carl Zeiss SMT GmbH
- Method for producing a mirror of a lithography system30 Jun 2026US 12,669,675 B2Carl Zeiss SMT GmbH
- Actuator-sensor system and fast steering mirror (FSM) having an actuator-sensor system of this type16 Jun 2026US 12,656,597 B2Micro-Epsilon Messtechnik GmbH & Co.KG
- Euv mirror with improved optical stability10 Sep 2026US 2026/0267232 A1Taiwan Semiconductor Manufacturing Company.Ltd
- Securing device23 Jul 2026US 2026/0211211 A1
- Lithographic apparatus thermal conditioning system and method16 Jul 2026US 2026/0202767 A1ASML Netherlands B. V.
- Lithography system comprising a measurement device18 Jun 2026US 2026/0169398 A1
- Reducing optical loss in high power laser applications18 Jun 2026US 2026/0171745 A1The Regents of the University of California
Most cited
By later US patents
- Method for making elemental semiconductor mirror for vehicles328US 5,535,056 ADonnelly Corporation · 1996
- Elemental semiconductor mirror for vehicles303US 5,751,489 ADonnelly Corporation · 1998
- Elemental semiconductor mirror for vehicles and method for making same299US 6,286,965 B1Donnelly Corporation · 2001
- Image display device and adjustment for alignment267US 6,631,994 B2Mitsubishi Denki Kabushiki Kaisha · 2003
- Mirror assembly with heater element160US 7,400,435 B2Donnelly Corporation · 2008