Lithographic apparatus thermal conditioning system and method

A thermal conditioning system configured to thermally condition an object, wherein the thermal conditioning system comprises:

• a fluid duct configured to be connected to the object and configured to provide a flow of a thermal conditioning fluid to the object, the fluid duct comprising:
• a supply duct configured to be connected to the object and to supply the thermal conditioning fluid to the object and
• a discharging duct configured to be connected to the object and to discharge the thermal conditioning fluid from the object,
• wherein at least one of the supply duct and the discharging duct is provided with at least two silencers arranged in series along the respective at least one of the supply duct and the discharging duct,
• wherein the at least two silencers form a resonator with the thermal conditioning fluid in the fluid duct interconnecting the at least two silencers,
• wherein the resonator is configured to attenuate disturbances in a disturbance frequency band, and
• wherein a resonance frequency of the resonator is below the disturbance frequency band.

A method of thermally conditioning an object of a lithographic apparatus, comprising:

• providing a flow of a thermal conditioning fluid via a fluid duct to the object, the fluid duct being connected to the object and comprising a supply duct connected to the object to supply the thermal conditioning fluid to the object and a discharging duct connected to the object to discharge the thermal conditioning fluid from the object,
• wherein at least one of the supply duct and the discharging duct is provided with at least two silencers arranged in series along the respective at least one of the supply duct and the discharging duct,
• wherein the at least two silencers form a resonator with the thermal conditioning fluid in the fluid duct interconnecting the at least two silencers,
• wherein the resonator is configured to attenuate disturbances in a disturbance frequency band, and
• wherein a resonance frequency of the resonator is below the disturbance frequency band.