Method for producing a mirror of a lithography system

A method, comprising:

• providing first and second mirror parts, the first mirror part comprising cooling channels comprising elongate cooling channel openings in a region of a first connecting surface of the first mirror part, and/or the second mirror part comprising cooling channels comprising elongate cooling channel openings in a region of a second connecting surface of the second mirror part;
• bringing together the first and second mirror parts so that initially a partial region of the first connecting surface and a partial region of the second connecting surface come into contact and form a common contact surface;
• and
• enlarging the common contact surface by continuing to bring the first and second mirror parts together in a direction along longitudinal extents of the cooling channel openings,
• wherein:
• the first connecting surface has a curvature;
• the second connecting surface has a curvature;
• and
• the method further comprises continuing to bring the first and second mirror parts together along a direction in which at least one surface selected from the group consisting of the first connecting surface and the second connecting surface has a mean radius of curvature with the smallest absolute value.

A method, comprising:

• providing first and second mirror parts, the first mirror part comprising cooling channels comprising elongate cooling channel openings in a region of a first connecting surface of the first mirror part, and/or the second mirror part comprising cooling channels comprising elongate cooling channel openings in a region of a second connecting surface of the second mirror part;
• bringing together the first and second mirror parts so that initially a partial region of the first connecting surface and a partial region of the second connecting surface come into contact and form a common contact surface;
• and
• enlarging the common contact surface by continuing to bring the first and second mirror parts together in a direction along longitudinal extents of the cooling channel openings,
• wherein the first connecting surface has a first curvature, the first curvature has different mean radii of curvature for different azimuthal angles, and the first curvature is non-rotationally symmetric.

A method, comprising:

• providing first and second mirror parts, the first mirror part comprising cooling channels comprising elongate cooling channel openings in a region of a first connecting surface of the first mirror part, and/or the second mirror part comprising cooling channels comprising elongate cooling channel openings in a region of a second connecting surface of the second mirror part;
• bringing together the first and second mirror parts so that initially a partial region of the first connecting surface and a partial region of the second connecting surface come into contact and form a common contact surface;
• and
• enlarging the common contact surface by continuing to bring the first and second mirror parts together in a direction along longitudinal extents of the cooling channel openings,
• wherein:
• the first mirror part further comprises auxiliary channels comprising elongate auxiliary channel openings in the region of the first connecting surface;
• and
• the auxiliary channels of the first mirror part are fluidically separated from the cooling channels of the first and/or second mirror part.