Process chamber with reflector
AssigneeApplied Materials, Inc.
InventorsAla Moradian, Amir H. Tavakoli, Peter Reimer, Shu-Kwan Lau
Life of this patent
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Abstract
A reflector and processing chamber having the same are described herein. In one example, a reflector is provided that includes cylindrical body, a cooling channel, and a reflective coating. The cylindrical body has an upper surface and a lower surface. The lower surface has a plurality of concave reflector structures disposed around a centerline of the cylindrical body. The cooling channel disposed in or on the cylindrical body. The reflective coating is disposed on the plurality of concave reflector structures.
Claims17
A light reflector for use in a semiconductor processing chamber, the reflector comprising:
- a cylindrical body having an upper surface and a lower surface, the lower surface having a plurality of concave reflector structures disposed around a centerline of the cylindrical body, wherein the cylindrical body is made from a polymer;
- a shell extending through the cylindrical body and projecting below the lower surface to a distal end, wherein the shell is made from a second polymer, wherein the polymer and the second polymer are combined with a filler that improves thermal conductivity of the polymer and the second polymer, the filler including one or more of boron nitride, aluminum nitride, silicon carbide, carbon-based structures, diamond, or metal powder;
- a cooling channel disposed in or on the cylindrical body;
- and
- a reflective coating disposed on the plurality of concave reflector structures.
A processing chamber applicable for use in semiconductor manufacturing, comprising:
- a chamber body having an internal volume;
- a plurality of lamps;
- a substrate support disposed in the internal volume, the substrate support comprising a support surface;
- a window disposed over the substrate support and at least partially bounding the internal volume;
- a reflector positioned to reflect light emitted from the lamps through the window and into the internal volume, the reflector comprising:
- a cylindrical body having an upper surface and a lower surface, the lower surface having a plurality of concave reflector structures disposed around a centerline of the cylindrical body, wherein the cylindrical body is constructed from a polymer;
- a shell extending through the cylindrical body and projecting below the lower surface to a distal end, wherein the shell is made from a second polymer, wherein the polymer and the second polymer are combined with a filler that improves thermal conductivity of the polymer and the second polymer, the filler including one or more of boron nitride, aluminum nitride, silicon carbide, carbon-based structures, diamond, or metal powder;
- a cooling channel disposed in or on the cylindrical body;
- and
- a reflective coating disposed on the plurality of concave reflector structures.
A processing chamber applicable for use in semiconductor manufacturing, comprising:
- a chamber body having an internal volume;
- a plurality of lamps;
- a substrate support disposed in the internal volume, the substrate support comprising a support surface;
- a window disposed over the substrate support and at least partially bounding the internal volume;
- a reflector positioned to reflect light emitted from the lamps through the window and into the internal volume, the reflector comprising:
- a cylindrical body having an upper surface and a lower surface, the lower surface having a plurality of concave reflector structures disposed around a centerline of the cylindrical body, the cylindrical body is made from a polymer;
- a shell extending through the cylindrical body and projecting below the lower surface to a distal end, the shell is made from a second polymer;
- wherein the polymer and the second polymer are combined with a filler that improves thermal conductivity of the polymer and the second polymer, the filler including one or more of boron nitride, aluminum nitride, silicon carbide, carbon-based structures, diamond, or metal powder;
- and
- a baffle coupled to the distal end of the shell,
- a cooling channel disposed in or on the cylindrical body, a second cooling channel disposed in or on the shell, each cooling channel having an inlet and an outlet port disposed through the upper surface or a side surface of the cylindrical body and shell;
- and
- a reflective coating disposed on the plurality of concave reflector structures, the reflective coating is gold or aluminum.
Dependencies are inferred from the claim text.