Microelectromechanical apparatus with heating element
AssigneesRobert Bosch GmbH, Carl Zeiss SMT GmbH
InventorsRalf Noltemeyer, Arnd Kaelberer
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AssigneesRobert Bosch GmbH, Carl Zeiss SMT GmbH
InventorsRalf Noltemeyer, Arnd Kaelberer
Estimating the term…
The invention relates to a microelectromechanical apparatus comprising one or more microelectromechanical devices each having a mirror element, an actuator for moving the respective mirror element, and a heating element for heating the respective mirror element, wherein the microelectromechanical apparatus comprises one or more temperature sensors and an electronic system, wherein the control electronic system is configured to determine a temperature value of the respective mirror element using the one or more temperature sensors for each mirror element, and the electronic system is further configured to adjust a heating power for each of the heating elements. The invention further relates to an illumination optical unit, to an illumination system and to a projection exposure apparatus, each having a microelectromechanical apparatus according to the invention, and to a method for controlling temperatures of a microelectromechanical apparatus in a closed-loop.
A microelectromechanical apparatus comprising one or more microelectromechanical devices each having a mirror element, an actuator for moving the respective mirror element, and a heating element for heating the respective mirror element,
A method for controlling temperatures of a microelectromechanical apparatus in a closed-loop, wherein the microelectromechanical apparatus has an electronic system, one or more temperature sensors and one or more microelectromechanical devices, each having a mirror element and a heating element for heating the respective mirror element,
Dependencies are inferred from the claim text.