Mems mirror array module

A MEMS mirror array module, comprising:

• a MEMS mirror array structure;
• a rewiring substrate comprising a first side and a second side opposite the first side, the first side of the rewiring substrate supporting the MEMS mirror array structure;
• an interface assembly disposed on the second side of the rewiring substrate, the interface assembly configured to secure the MEMS mirror array module to a superordinate assembly;
• a cavity between the rewiring substrate and the interface element, the cavity comprising walls that are thermally conductively connected to the rewiring substrate;
• and
• a fluid line configured to have a fluid flow therethrough, the fluid line being in thermally conductive contact with the walls of the cavity, and a portion of the fluid line extending out of the MEMS mirror array module through the interface element.