G02B 26/0833
The reflecting element being a micromechanical device
Official title: {the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD (G02B26/0825 takes precedence; micromechanical devices in general B81B)}
G02B26/0833 (The reflecting element being a micromechanical device) appears on 6,051 US grants and 6,635 published applications in this corpus.
Search patents in G02B- Granted patents
- 6,051
- Published applications
- 6,635
- Assignees
- 1,408
- Inventors
- 7,908
- Latest grant
- 6 Oct 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1980 | 1 | 0 |
| 1981 | 0 | 0 |
| 1982 | 0 | 0 |
| 1983 | 1 | 0 |
| 1984 | 2 | 0 |
| 1985 | 0 | 0 |
| 1986 | 4 | 0 |
| 1987 | 3 | 0 |
| 1988 | 1 | 0 |
| 1989 | 4 | 0 |
| 1990 | 3 | 0 |
| 1991 | 6 | 0 |
| 1992 | 15 | 0 |
| 1993 | 13 | 0 |
| 1994 | 13 | 0 |
| 1995 | 24 | 0 |
| 1996 | 51 | 0 |
| 1997 | 69 | 0 |
| 1998 | 70 | 0 |
| 1999 | 79 | 0 |
| 2000 | 82 | 0 |
| 2001 | 76 | 42 |
| 2002 | 119 | 242 |
| 2003 | 160 | 215 |
| 2004 | 210 | 252 |
| 2005 | 226 | 342 |
| 2006 | 290 | 332 |
| 2007 | 210 | 277 |
| 2008 | 234 | 307 |
| 2009 | 195 | 277 |
| 2010 | 226 | 212 |
| 2011 | 205 | 158 |
| 2012 | 157 | 202 |
| 2013 | 169 | 171 |
| 2014 | 206 | 223 |
| 2015 | 168 | 263 |
| 2016 | 200 | 250 |
| 2017 | 233 | 247 |
| 2018 | 238 | 285 |
| 2019 | 287 | 323 |
| 2020 | 277 | 382 |
| 2021 | 272 | 380 |
| 2022 | 263 | 386 |
| 2023 | 291 | 294 |
| 2024 | 310 | 237 |
| 2025 | 253 | 183 |
| 2026 | 135 | 153 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Subgroups
Granted patents
- G02B 26/0841The reflecting element being moved or deformed by electrostatic means2,422
- G02B 26/0858The reflecting means being moved or deformed by piezoelectric means855
- G02B 26/085The reflecting means being moved or deformed by electromagnetic means829
- G02B 26/0866The reflecting means being moved or deformed by thermal means149
Recent patents
- Optical module6 Oct 2026US 12,754,412 B2Hamamatsu Photonics K.K.
- Projection system with collimating scanning mirror6 Oct 2026US 12,754,429 B2Magic Leap, Inc.
- Broadened spectrum laser diode for display device29 Sep 2026US 12,749,869 B2Microsoft Technology Licensing, LLC
- Scanning mirror with dual axis gimbal structure22 Sep 2026US 12,742,959 B2Omnitron Sensors Inc.
- Movable device, projection apparatus, head-up display, laser headlamp, head-mounted display, object recognition apparatus, mobile object, method of manufacturing movable device22 Sep 2026US 12,742,960 B2Ricoh Company, Ltd.
- Driving circuit for microelectromechanical systems (mems) micromirrors8 Oct 2026US 2026/0309977 A1Molex Incorporated
- Microelectromechanical mirror, method of operating a microelectromechanical mirror, projection device and use of a microelectromechanical mirror8 Oct 2026US 2026/0309978 A1
- Apparatus and methods to render 3d digital content having multiple views8 Oct 2026US 2026/0310005 A1Texas Instruments Incorporated
- Method and apparatus for dynamic multi plane fluorescence microscopy1 Oct 2026US 2026/0298827 A1Fluorescence Microscopy Business Unit (FMBU) of Bruker Nano Surfaces Division
- Systems and methods to reduce stiction in mems devices1 Oct 2026US 2026/0299283 A1Texas Instruments Incorporated
Most cited
By later US patents
- Interferometric modulation of radiation1,041US 6,674,562 B1Iridigm Display Corporation · 2004
- Photonic mems and structures872US 6,650,455 B2Iridigm Display Corporation · 2003
- Interferometric modulation of radiation856US 6,680,792 B2Iridigm Display Corporation · 2004
- Spatial light modulator and method846US 5,061,049 ATexas Instruments Incorporated · 1991
- Visible spectrum modulator arrays807US 5,835,255 AEtalon, Inc. · 1998