US 6,674,562 B1 · Interferometric modulation of radiation

Abstract

Improvements in an interferometric modulator that has a cavity defined by two walls.

Dependent claims

A method of making arrays of microelectromechanical structure on a production line comprising

forming electronic features on a surface of a glass or plastic substrate that is at least as large as 14″×16″, and
micromachining electromechanical structures on the substrate.

Dependencies are inferred from the claim text.

Facts

Application

09/056,975Filed 8 Apr 1998 · continuation in part

Priority

5 May 1994

Granted

6 Jan 2004

Term ends

Not estimatedThe source records don’t support an estimate.

G02B 26/085
The reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD: the reflecting means being moved or deformed by electromagnetic means
B82Y 20/00
Nanooptics
G01J 3/26
Generating the spectrum; Monochromators: using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters
G02B 6/12
Of the optical waveguide type: of the integrated circuit kind

Family

Application08/238,750Parent of this continuation-in-part · filed 5 May 1994

Application08/554,630Parent of this continuation-in-part · filed 6 Nov 1995

Application08/769,947Parent of this continuation-in-part · filed 19 Dec 1996

US 5,835,255 AParent of this continuation-in-part

US 6,674,562 B1This patent

From the US filing history. Foreign family members aren’t listed.

Improvements in an interferometric modulator that has a cavity defined by two walls.

Dependent claims

A method of making arrays of microelectromechanical structure on a production line comprising

forming electronic features on a surface of a glass or plastic substrate that is at least as large as 14″×16″, and
micromachining electromechanical structures on the substrate.

Dependencies are inferred from the claim text.