Scanning mirror with dual axis gimbal structure

A MEMS mirror assembly comprising:

• a mirror;
• a first arm and a second arm, each having a rotational degree of motion, each arm being hingedly attached to opposite ends of the mirror;
• a first pair of actuators coupled to opposite ends of the first arm, the first pair of actuators moving the first arm in the rotational degree of motion when the first pair of actuators are rotated in an opposite direction, wherein the mirror is rotated around a first axis by the arm, and wherein the first arm has a translational degree of freedom, and wherein the first pair of actuators translate the first arm in the translational degree of freedom when the first pair of actuators are rotated in the same direction, wherein the mirror is rotated around a second axis by the first arm when the first pair of actuators are rotated in the same direction;
• and
• a second pair of actuators coupled to opposite ends of the second arm, the second pair of actuators moving the second arm in the rotational degree of motion when the second pair of actuators are rotated in an opposite direction.

A light detector and ranging system comprising:

• a beam source array having a plurality of beam sources emitting a plurality of beams;
• a MEMS mirror assembly including:
• a mirror;
• a first arm and a second arm, each having a rotational degree of motion, each arm being hingedly attached to opposite ends of the mirror;
• a first pair of actuators coupled to opposite ends of the first arm, the first pair of actuators translate the first arm in a translational degree of freedom when the first pair of actuators are rotated in the same direction;
• and
• a second pair of actuators coupled to opposite ends of the second arm;
• a controller coupled to the MEMS mirror assembly to control the first and second pairs of actuators to tilt the mirror about the first axis to deflect the plurality of beams in a raster scan pattern toward the target area;
• a sensor to detect the return of each of the plurality of beams from the target area;
• and
• a processor to reconstruct distance data derived from each of the plurality of beams in a raster pattern of the target area.

A MEMS mirror assembly comprising:

• a mirror;
• a first arm and a second arm, each having a rotational degree of motion and a translational degree of freedom, each arm being hingedly attached to opposite ends of the mirror;
• a first pair of actuators coupled to opposite ends of the first arm, the first pair of actuators moving the first arm in the translational degree of freedom when the first pair of actuators are rotated in the same direction, and rotating the first arm in the rotational degree of motion when the first pair of actuators are rotated in an opposite direction;
• and
• a second pair of actuators coupled to opposite ends of the second arm, the second pair actuators moving the second arm in the translational degree of freedom when the second pair of actuators are rotated in the same direction, and rotating the second arm in the rotational degree of motion when the second pair of actuators are rotated in an opposite direction, wherein the mirror is rotated around a first axis by the first and second arms when the first and second pair of actuators are rotated in the same direction, and wherein the mirror is rotated around a second axis by the first and second arms when the first and second pair of actuators are rotated in the opposite direction.