Visible spectrum modulator arrays
AssigneeEtalon, Inc.
InventorMark W. Miles
Life of this patent
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AssigneeEtalon, Inc.
InventorMark W. Miles
Estimating the term…
Light in the visible spectrum is modulated using an array of modulation elements, and control circuitry connected to the array for controlling each of the modulation elements independently, each of the modulation elements having a surface which is caused to exhibit a predetermined impedance characteristic to particular frequencies of light. The amplitude of light delivered by each of the modulation elements is controlled independently by pulse code modulation. Each modulation element has a deformable portion held under tensile stress, and the control circuitry controls the deformation of the deformable portion. Each deformable element has a deformation mechanism and an optical portion, the deformation mechanism and the optical portion independently imparting to the element respectively a controlled deformation characteristic and a controlled modulation characteristic. The deformable modulation element may be a non-metal. The elements are made by forming a sandwich of two layers and a sacrificial layer between them, the sacrificial layer having a thickness related to the final cavity dimension, and using water or an oxygen based plasma to remove the sacrificial layer.
A device for modulating light in the visible spectrum comprising
The device of claim 34 in which the optical portion comprises an induced absorber.
The display of claim 1, 32 or 34 further comprising an electronically active substrate.
A reflective or transmissive flat panel display comprising the device of claim 1, 32 or 34.
The device of claim 1, 32, or 34 wherein said visible spectrum includes ultraviolet wavelengths in the visible spectrum.
The device of claim 1, 32 or 34 wherein said visible spectrum includes infrared wavelengths in the visible spectrum.
The device of claim 1, 32 or 34 wherein said layers comprise a quarter wave stack.
A device for modulating light in the visible spectrum comprising
A device for modulating light in the visible spectrum comprising
Dependencies are inferred from the claim text.