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US 2026/0309978 A1Published application
Microelectromechanical mirror, method of operating a microelectromechanical mirror, projection device and use of a microelectromechanical mirror
OwnerMatthias Wulf, Franz Rinnerinventors
Life of this patent
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Abstract
In an embodiment a microelectromechanical mirror includes a mirror element and a torsional suspension, which surrounds the mirror element and which is connected to the mirror element via two first torsion spring elements.
Claims39
-38. (canceled)
A microelectromechanical mirror comprising:
- a mirror element;
- and
- a torsional suspension, which surrounds the mirror element and which is connected to the mirror element via two first torsion spring elements.
Dependencies are inferred from the claim text.