G01R 19/0061
Measuring currents of particle-beams, currents from electron multipliers, photocurrents, ion currents
Official title: {Measuring currents of particle-beams, currents from electron multipliers, photocurrents, ion currents; Measuring in plasmas}
G01R19/0061 (Measuring currents of particle-beams, currents from electron multipliers, photocurrents, ion currents) appears on 154 US grants and 148 published applications in this corpus.
Search patents in G01R- Granted patents
- 154
- Published applications
- 148
- Assignees
- 127
- Inventors
- 346
- Latest grant
- 26 May 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1978 | 1 | 0 |
| 1979 | 0 | 0 |
| 1980 | 0 | 0 |
| 1981 | 0 | 0 |
| 1982 | 1 | 0 |
| 1983 | 0 | 0 |
| 1984 | 1 | 0 |
| 1985 | 0 | 0 |
| 1986 | 1 | 0 |
| 1987 | 1 | 0 |
| 1988 | 0 | 0 |
| 1989 | 0 | 0 |
| 1990 | 0 | 0 |
| 1991 | 1 | 0 |
| 1992 | 0 | 0 |
| 1993 | 2 | 0 |
| 1994 | 0 | 0 |
| 1995 | 5 | 0 |
| 1996 | 3 | 0 |
| 1997 | 1 | 0 |
| 1998 | 4 | 0 |
| 1999 | 1 | 0 |
| 2000 | 2 | 0 |
| 2001 | 2 | 2 |
| 2002 | 4 | 0 |
| 2003 | 5 | 3 |
| 2004 | 2 | 4 |
| 2005 | 1 | 7 |
| 2006 | 3 | 6 |
| 2007 | 1 | 7 |
| 2008 | 10 | 5 |
| 2009 | 4 | 5 |
| 2010 | 4 | 7 |
| 2011 | 5 | 2 |
| 2012 | 5 | 4 |
| 2013 | 7 | 9 |
| 2014 | 4 | 7 |
| 2015 | 7 | 4 |
| 2016 | 4 | 8 |
| 2017 | 10 | 6 |
| 2018 | 3 | 10 |
| 2019 | 9 | 8 |
| 2020 | 9 | 6 |
| 2021 | 5 | 6 |
| 2022 | 4 | 8 |
| 2023 | 7 | 5 |
| 2024 | 8 | 8 |
| 2025 | 4 | 6 |
| 2026 | 3 | 5 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- System and method for non-invasive sensing of radio-frequency current spectra flowing in a plasma processing chamber26 May 2026US 12,638,485 B2APPLIED Materials.Inc.
- Amplifier device for amplifying small currents14 Apr 2026US 12,603,623 B2Inficon GmbH
- Module for measuring current/voltage/power of plasma apparatus and plasma apparatus including the same17 Mar 2026US 12,580,167 B2Koreas Institute of Fusion Energy
- Beam monitor and methods of use25 Nov 2025US 12,481,076 B2TibaRay, Inc.
- Systems, devices, and methods for beam misalignment detection4 Nov 2025US 12,460,916 B2Tae Technologies, Inc.
- Systems, devices, and methods for beam misalignment detection6 Aug 2026US 2026/0227171 A1Tae Technologies, Inc.
- Plasma probe device and plasma processing apparatus25 Jun 2026US 2026/0176764 A1Tokyo Electron Limited
- System and Method for Measuring Ion Currents During a Plasma Processing11 Jun 2026US 2026/0165089 A1Inspiring Atoms Pte Ltd
- Beam Monitor and Methods of Use30 Apr 2026US 2026/0118534 A1TibaRay, Inc.
- Vi sensor and method for monitoring of plasma status2 Apr 2026US 2026/0092955 A1Korea Institute of Fusion Energy
Most cited
By later US patents
- Radio frequency Langmuir probe105US 7,015,703 B2Scientific Systems Research Limited · 2006
- Wide-dynamic range electrometer with a fast response57US 8,278,909 B2MKS Instruments, Inc. · 2012
- Arc detection56US 8,334,700 B2MKS Instruments, Inc. · 2012
- Application of wideband sampling for arc detection with a probabilistic model for quantitatively measuring arc events54US 8,289,029 B2MKS Instruments, Inc. · 2012
- Method and apparatus for eliminating displacement current from current measurements in a plasma processing system53US 6,433,553 B1Varian Semiconductor Equipment Associates, Inc. · 2002