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US 8,334,700 B2Granted
Arc detection
AssigneeMKS Instruments, Inc.
InventorsDavid J. Coumou, Riad E. El-Choueiry
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Abstract
An arc detection system for a plasma generation system includes a radio frequency (RF) sensor that generates first and second signals based on a respective electrical properties of (RF) power that is in communication with a plasma chamber. A correlation module generates an arc detect signal based on the first and second signals. The arc detect signal indicates whether an arc is occurring in the plasma chamber and is employed to vary an aspect of the RF power to extinguish the arc.
Claims14
An arc detection system for a plasma generation system, comprising:
- a radio frequency (RF) sensor that generates first and second signals based on a respective electrical properties of RF power that is in communication with a plasma chamber;
- and
- an analysis module that:
- determines an estimation of the RF power based on correlating the first and second signals that is in communication with the plasma chamber for a period based on the first and second signals,
- determines a derivative of the estimation of the RF power for the period,
- determines whether an arc is occurring in the plasma chamber by comparing an absolute value of the derivative of the estimation of the RF power with a variable threshold, and
- if the absolute value of the derivative of the estimation of the RF power is greater than the variable threshold, generates an arc detect signal and determines an estimated energy of the arc based on the first and second signals,
- wherein the arc detect signal is employed to vary an aspect of the RF power to extinguish the arc.
5 more elements
Dependencies are inferred from the claim text.