Vi sensor and method for monitoring of plasma status
AssigneeKorea Institute of Fusion Energy
InventorsJongsik Kim, Sanghyeok Park, KiHwan Cho, JungHo Song
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Abstract
The present disclosure relates to a VI sensor and a method for monitoring a plasma state, and includes a collector configured to collect, as sensing data, RF voltages, RF currents, incident wave powers, and reflected wave powers generated during a plasma process, and a processor configured to train an artificial intelligence algorithm by applying the sensing data and setting values of plasma equipment identified at the time when the sensing data is generated, and to derive prediction data capable of monitoring a plasma state and a plasma process state using the trained artificial intelligence algorithm, and other embodiments are also applicable.
Claims10
A Voltage-Current (VI) sensor for monitoring a plasma state, comprising:
- a collector configured to collect, as sensing data, RF voltages, RF currents, incident wave powers, and reflected wave powers generated during a plasma process;
- and
- a processor configured to apply the sensing data and setting values of a plasma equipment identified at the time when the sensing data is generated to an artificial intelligence algorithm to train the artificial intelligence algorithm, and to derive prediction data capable of monitoring a plasma state and a plasma process state using the trained artificial intelligence algorithm.
A method for monitoring a plasma state, comprising:
- collecting, using a VI sensor, as sensing data, RF voltages, RF currents, incident wave powers, and reflected wave powers generated during a plasma process;
- training, by the VI sensor, an artificial intelligence algorithm by applying the sensing data and setting values of a plasma equipment identified at the time when the sensing data is generated to the artificial intelligence algorithm;
- and
- deriving, using the VI sensor, prediction data capable of monitoring a plasma state and a plasma process state using the trained artificial intelligence algorithm.
Dependencies are inferred from the claim text.